12 Inch 11N Silicon Electrode P Type for High-end Etching Machine

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Product Overview

Description



Products Characteristic








Products Description


Materials Features


Parameter
Specification
Pulling Method
CZ
Orientation
<100>
Type
P
Dopant
Boron
Resistivity(ohm.cm)
            Option (<0.015, 1-5 , >10)
Oxygen Concentration
 <15 E 17 atoms/cm3
Carbon Concentration
  <5 E 16   atoms/cm


ICP-MS


* E12 atoms/cm3
Sample 1
Sample 2
Na
<0.1
<0.1
K
<0.1
<0.1
Mg
<0.1
<0.1
Al
1.9
2.1
Ca
<1
<1
Cr
<0.1
<0.1
Fe
<0.1
<0.1
Ni
<0.1
<0.1
Cu
<0.1
<0.1
Ti
<1
<1
Mn
<0.1
<0.1
Co
<0.1
<0.1
Zn
<1
<1
Mo
<0.1
<0.1


Capacity of Si parts


Diameter(mm)
Res(ohm.cm)
Purity
200-385
Low<0.015
Normal1-5
High>10
~11N
385-475
Low<0.015
Normal1-5
High>10
~11N


Brand
Small Hole Diameter
Partical Control 0.1um up(ea/cm2)
Pore Size Accuracy
Deviation Control
Surface Roughness
King Choice
0.4mm-0.7mm
<1
<1%
±0.03mm
0.02-0.8


Application
Silicon electrode and focusing ring are the key consumables of semiconductor core equipment etching machine,widely used in dry etching process. The focusing ring at the edge of the silicon chip supports the chip and synchronizes the etching.


Details Images






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Company Profile


Optics
Semiconductor
Solar


Automotive glass coating
Flat pannel display
Lens


Dalian King Choice is a comprehensive company integrated with production and trading of high purity coating materials used in surface treatment industry, such as Optics, Building glass, Automotive glass, Flat-panel Display and Surface Decoration etc.






Main Products




Our Advantages


With the export experience accumulated for 32 years, we can do the followings for our customers,
1. Reasonable but competitive pricing;
2. Stable quality and reliable quality control;
3. Less MOQ;
4. On-time delivery and post-sale service;
5. Never escape from our responsibility;
6. New materials updated in time...


You will find King Choice is your Right Choice!


Certifications






Number
Recommended Weight
Dimension
Number
Recommended Weight
Dimension

KCC1#

              15kgs
L:380mm

KCCB1#

             10kgs
L:360mm
W:270mm
W:250mm
H:130mm
H:110mm


Way of Transportations
We generally deliver our products to our customers by sea, by air and by courier.




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