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Model | GX900 | GX1350 | GX2050 | GX2700 | |||
Demension | 900X1050 | 1350X1500 | 2050X1650 | 2700X1950 | |||
Vacuum chamber Structure | Vertical single door, Horizontal single door | ||||||
Clamping system | Revolving umbrella frame on the center, single or split. Magnetic fluid sealing device is adopted, and the speed of clamp is adjusted by imported frequency converter. | ||||||
Vacuum system | Molecular pump / Cryogenic pump / Diffusion pump + mechanical pump / rotary vane pump + roots pump + holding pump + POLDCOLD (optional) | ||||||
Coating System | Crucible (hole / ring / hole + ring) +electron gun + Crystal diaphragm thickness controller (SQC310) + ion source + Resistance steam source | ||||||
Control system | Fully automatic, semi-automatic, manual integrated touch screen / industrial computer + PLC | ||||||
Material | Stainless Steel | ||||||
Coating material | TiO2, Ti3O5, ZrO2, ITO,SiO, SiO2, ZnS, MgO, MgF2, Al2O3, Ce, HfO2, Cr, Ag, Au, Ti, Al, H4, In, Sn | ||||||
Application | AR, AF, AS, HR film, UV / IR cut-off filter, band-pass filters ,.etc | ||||||
Ultimate Pressure | 8×10-4pa (no load, clean) | ||||||
Pumping speed | Pumping from no load and atmosphere to 3 × 10-3Pa ≤ 15min | ||||||
Remark | Equipment demension can be customized according to customer requirements. |