Features
| - Film measurement is carried out in two steps: data acquisition and data analysis; the process provides results in seconds.
- Optical properties obtained from reflection and thickness is measured by detecting the sinusoidal fringe pattern from the sample's specular reflectance
- Real-time Spectral Capture and Instrument control for Reflectance and/or Transmittance
- Supports multilayer, freestanding, rough, and both thick and thin layer structures
- Large Library of Materials Data
- Easily add new materials by measuring corresponding sample or importing data from file
- Supports Parameterized materials: Cauchy, Sellmeir, Effective Medium Approximation, Harmonic Oscillator, Tauc-Lorentz Oscillator, Drude-Lorentz and much more
|
Precision | 0.1Å or 0.01% (standard deviation obtained from 100 thickness readings of a 100nm SiO2/Si calibration sample) |
Accuracy | 0.2% or 10A (film stack dependent) |
Stability | 0.2A or 0.02% (2 sigma over 20 days with 100 measurements daily on a 100nm/Si calibration sample) |
Spot Size | 3 mm standard, optional down to 3 µm |
Sample Size | from 1 mm |
Communication Interface | USB-2 interface cable establishes the communication interface between the spectrometers and any personal computer for a portable or tabletop measurement system. (Note: Laptop shows in the picture is not included.) |
Supported Film Types | Below are some of the films and coatings that can be measured with EQ-TFCAS:
- Hardcoats or Protective Coatings
- Metal Films
- Ophthalmic Lens Coatings
- Optical Coatings
- Parylene Coatings (mositure & electrical barriers)
- Polymer Films
- Solar Photovoltaics Layers
- Semiconductor Process Films
- Thick Photoresists (e.g. SU-8)
- Transparent Conductive Oxides
|
Software: TFCompanion
| TFCompanion defines the process in a measurement recipe and makes it transparent to the user. At the same time, the user has the ability to store measured data and analyze it later. The operating software allows for simple curve fitting and accuracy measurements and material types can also be defined in software by equation or dispersion formulas. - Large library of refractive index (n) and extinction coefficient (k) values for the most common metallic, dielectric, amorphous and crystalline substrate materials.
- Capability for analyzing simple and the most complex filmstacks (graded layers, periodic structures, very thick films,
films on thin substrates, multi-sample measurements, etc). - Error-estimation and simulation tools allow for factoring in the effects of changing conditions such as surface roughness, ambient light and etc. that could change during in-situ, in-line, and other long running measurements.
- Support for Parameterized materials with approximations representing optical dispersion in a desired spectral range using few coefficients that can be adjusted.
- Oxides frequently represented using new materials can be added easily by measuring the corresponding sample or importing data from the text file.
N, K values NOTE: Laptop computer is NOT included and must be purchased separately. We recommend customers to purchase laptop with software installed for additional $995 to avoid installation issues. |
Measurement Standards (Included) | 100nm and 1000nm thick SiO2 substrates included as thin Film standards for thickness measurement verification. 100nm Standard 1000nm Standard |
MODBUS TCP Server Add-on (OPTIONAL) | - The Modbus server plugin provides a communication interface over TCP IP. The software is deployed as a server and supports external program integration. This allows user to send a measurement request from any program and receive back the thickness results data.
- Available upon request for an extra $2550
|
In-Situ Deposition Analysis | Depositions consist of atom-by-atom or molecule-by-molecule layers at sub-atmospheric pressure on a solid surface can also be measured by the EQ-TFCAS. These layers may be as thin as one atom to millimeters thick on freestanding structures.
Please contact us for potential implementations of in-situ deposition analysis. |
Operation Instruction | Coming soon |
Net Weight | 11 lbs |
Dimensions | 18"x16"x12" |
Crating Dimensions | 18"x18"x18" |
Shipping weight | 20 lbs |
Warranty | One year limited warranty with lifetime support. |