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Model | VPD 1616 S | VPD 1618 S | VPD 1420 S | ||
Dimension | 1600x700x1600 | 1600x700x1800 | 1400x620x2000 | ||
Material | SUS304 stainless steel or carbon steel | ||||
Vacuum system | Diffusion pump +Roots pump +Rotary pump(3.0*10-4Pa) | ||||
Working cycle | Public rotation Frequency control: 0-20 rotation per minute | ||||
Process power | Imported MF power supply | ||||
Cooling system | POLY cold unit( reaching under 130°C), CHILLER | ||||
Control system | PLC and one touch screen | ||||
Remark | All can be designed according to customer's requests. | ||||














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