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Model | VPD 1015 S | ||||
Dimension | 1000x1500 | ||||
Material | SUS304 stainless steel or carbon steel | ||||
Vacuum system | Diffusion pump +Roots pump +Rotary pump(3.0*10-4Pa) | ||||
Working cycle | Public rotation Frequency control: 0-20 rotation per minute | ||||
Process power | MF power supply | ||||
Cooling system | CHILLER / POLY cold unit( reaching under 130°C) | ||||
Control system | PLC and one touch screen | ||||
Remark | All can be designed according to customer's requests. | ||||
















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