Product Description

1.The BTF-1200C-SL-PECVD series furnace workstation consists of BTF-1200C-SL series single zone tube furnace, a precision mass flow gas control station, a high vacuum station and other assembling parts. We adopted imported vacuum pump and valve with reliable quality.
The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 4X10-2pa (with our sealing assembly provided). The mass flow gas control station mixes several kinds of gas together and input the mixed gas into a fused quartz tube inside the furnace.

2.The technology of control circuit is vague PID automatic control with high precision temperature and operate easily.

3.The PECVD growing-system is especially invented for producing graphene.

the system contained by : Plasma enhance source /tube furnace /vacuum system /gas atmosphere system 

Temperature Controller
· PID automatic control and auto-tune function.
· 30 programmable segments for precise thermal processing.
· Built-in protection for the over-heated and broken thermocouple.
Temperature Accuracy: +/- 1 °C.
· K type thermocouple.
Heating Elements
· Fe-Cr-Al Alloy doped by Mo

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Packing&Shipping

Our Services & Strength
1)Customization:Mature design team, professional production team, exquisite craftsmanship team
2)First mover:First to introduce professional organic small molecule purification equipment The first set of continuous CVD thin film graphene preparation equipment
3)Technological innovation:BEQ is the only company in the same industry in China with an independent laboratory equipped with a process department, which can do substantive tests for different process equipment, and undertake various commissioned tests for free
4)Brand:At present, there are more than 50,000 cooperative customers, gradually forming a professional, high-quality, and honest corporate image among the majority of users, and establishing a good market reputation

Contact us

Contact us freely if any interest

Company Introduction
BEQ is the professional manufacturer for material R&D equipment.