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Model | EVZF-1000 | EVZF-1200 | EVZF-1400 | EVZF-1600 | EVZF-1800 | EVZF-2000 | |||||
Vacuum chamber size | D1000×H 1200mm | D1200×H 1500mm | D1400×H 1600mm | D1600×H 1800mm | D1800×H 2000mm | D2000×H 2200mm | |||||
Power supply | Resistance evaporation power supply | ||||||||||
Vacuum chamber material | SS304 superior stainless steel or superior carbon steel | ||||||||||
Vacuum chamber structure | Vertical single/double door, back vacuum acquisition system | ||||||||||
Ultimate vacuum | Better than 8.0x10-4Pa (no-load), leak rate1h≤0.6Pa | ||||||||||
Pumping speed | From atmosphere to 6.7×10-3Pa spend 8~15min (no-load) | ||||||||||
Evaporation power | 10KW | 15KW | 20KW | 20KW | 25KW | 35KW | |||||
Total power | 25KW | 40KW | 60KW | 65KW | 85KW | 95KW | |||||
Vacuum system | Diffusion pump + roots pump + rotary vane pump + holding pump (can be adjusted) | ||||||||||
Measurement system | Use automatic digital display vacuum gauge | ||||||||||
Intake system | Flow controller can be optional and with automatic control, also can be shifted between manual and automatic | ||||||||||
Rotation mode | Frequency stepless | ||||||||||
Cooling system | Water-cooling circulatory system,cooling water tower or industrial cooling water machine is also needed (supplied by customer) | ||||||||||
Control mode | Manual or PLC + touch screen, can achieve automatic, manual and semi-automatic control | ||||||||||
Alarm and protection | Water pressure alarm, atmosphere pressure alarm, over current protection, related protective measures and electrical interlock functions. | ||||||||||
Other data | Water pressure≥0.2MPa, water temperature≤25℃, atmosphere pressure 0.5-0.8MPa | ||||||||||
Remark | Specific configuration size can be designed according to customer requirements. Can be equipped with magnetron sputtering power supply and intermediate frequency power supply. Customizable vacuum chamber size range is D:500-3000mm, H: 500-3000mm. | ||||||||||




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