(1.1）The role of plasma cleaning
The principle of plasma cleaning is mainly：
（A）Etching on the surface of materials - physical effects
A large number of active particles in the plasma, such as a large number of ions, excited
molecules, and free radicals,
act on the surface of the solid sample, which not only removes the original contaminants and
impurities, but also produces an etching effect to roughen the surface of the sample. Many fine
pits are formed, increasing the surface ratio of the sample. Improve the wetting properties of
（B）Activation bond energy, cross-linking
The energy of the particles in the plasma is between 0-20 eV, and most of the bonds in the
polymer are between 0-10 eV.
When a solid surface is used, the original chemical bond on the solid surface can be broken, and
the free radicals in the plasma and these bonds
The formation of a network of crosslinked structures greatly activates surface activity.
（C）Forming new functional groups - chemistry
If a reactive gas is introduced into the discharge gas, a complicated chemical reaction occurs on
the surface of the activated material, and new functional groups such as a hydrocarbon group,
an amino group, a carboxyl group, and the like are introduced, and these functional groups are
all active groups, which can significantly improve the surface activity of the material.