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Vacuum multi-arc ion coating machine
1)Vacuum multi-arc ion coating or Arc-PVD is a physical vapor deposition technique in which an electric arc is used to vaporize material from a cathode target. The vaporized material then condenses on a substrate, forming a thin film. The technique can be used to deposit metallic, ceramic, and composite films.
2)This is a high temperature PVD process. It works with gases and you can apply both of decorative and functional coatings on the materials which can bear high temperature, such as: ceramic, glass, metals.
3)Involved industries: Glass & ceramic decorative parts, cutting tools, molds, punches, etc
4)Cycle time: From 20 min to hours, according to the processes
5)Main Coatings: TiN, CrN, TiAlN, AlTiN, TICN and other metal coatings
Type | LZ-1500 | LZ-1800 | LZ-2000 | LZ-2200 | LZ-2300 | LZ-3200 |
Vacuum chamber size | D1500×H 3500 | D1800×H 3500mm | D2000×H 4000mm | D2200×H 4500mm | D2300×H 3500mm | D3200×H 2100mm |
Chamber structure | Vertical | Vertical | Vertical | Vertical | Vertical | Vertical |
Material | SUS304 | |||||
Heating | 60KW | 60KW | 75KW | 80KW | 80KW | 60KW |
Arc No. | 24 | 26 | 30 | 36 | 30 | 30 |
Arc power | 200A | |||||
Bias power | 10kw | 10kw | 12KW | 12KW | 20KW | 20KW |
Vacuum pump | Diffusion pump / Molecular pump + roots pump + rotary vane pump + holding pump / Direct connect pump (can be adjusted by requested) | |||||
Vacuum gauge | Tsinghua9940B | |||||
Control system | Manual / PLC+touch screen | |||||
Process gas | Mass flow controller(4ways),Manual or automatic processing gas system | |||||
Cooling system | Cooling water tower, water cycle cooling system, | |||||
Pumping speed | From 1 atm to 2.0×10-2Patakes less than 15min (room temperature, clean and unload) | |||||
Ultimate vacuum | 8.0×10-4Pa | |||||
Leakage rate | 1h≤0.6Pa | |||||
Alarm and protection | Water pressure alarm, air pressure alarm, over current protection, execution on related protective measures and electrical interlock systems. | |||||
Foot print | W3m×L3.5m | W3m×L3.5m | W3.5m×L5m | W3.5m×L5m | W4.5m×L5.5m | W5.5m×L5.5m |
Other technical data | Water pressure ≥0.2MPa,water temperature ≤25℃,air pressure0.5-0.8MPa |
One year since the equipment arrive at final user's site.
Within the warranty period, free maintenace and repairing services, free spartparts providing.
Warranty period is expired, whole life's reparing & system upgrade service, spareparts would be charged accordingly.
1.We will response within 24 hours after the buyer's formal Technical Support Reprt.
2.After the buyer receives the formal Finishing Inspection Report from seller, the buyer should inspect the machine in site within 7 days. After inspection approval,the buyer should pay the balance before shipment.
3. 12 months' warranty and the whole machine life maintenance.(Charged during the warranty due to human's damage or wrong operation).
4. Sellers provide Customer Files for maintenance and repairing service.
5. Sellers should provide the spare parts to buyer during the equipment's life time as requested.
Question 1: Are you manufacturer?
Answer: Yes, We are a CE, ISO,SGS certification manufacturer. Welcome to visit our factory anytime!
Question 2:Are engineer avaliable for after sales?
Answer: Yes. Engineer avaliable to oversea for trainning .
Question 3: What is price of the machine?
Answer: The machine is custom made.But we still have price range for reference based on the system.
If you have any drawing or any information on specification of the machine, please send to us for quote.
If you are totally new in this area, please tell us the max. dimension of your products, its application, and your desired capacity.
Our team will provide our professional suggestions and work out an appropriate design for your project.
Question 4: Does the machine operate and maintain easily?
Answer: Yes. We alway focus on intelligent operation and high quality deliver system to reduce maintenance.But we still have 1 year's warranty.The smart design makes it easily to control. named components make circuit protection system more safety.
Question 5: Do I have to pay for the pollution?
Answer: The machine is environment-friendly, there is no chemical liquid waste or harmful gas. This is a green technology.
We can also provide the relevant accessories