P18.XYZ200K metrology piezo XYZ stage high precision motion linear stage for test and measurement equipment nano stage
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- Supplier: Harbin Core Tomorrow Science And Technology Co. Ltd.
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Product Overview
Description
Type | K-Open loop | P18.XYZ200K | Units |
Active axis | XYZ |
| |
Driving channels | 3 |
| |
Travel range(0~120V) | 160/axis | μm±10% | |
Travel range(0~150V) | 200/axis | μm±10% | |
Aperture | Ø35 | mm | |
Resolution | 2 | nm | |
Pitch/yaw/roll | <25 | μrad | |
Push/pull force capacity | 30/10 | N | |
Stiffness | 0.1 | N/μm±20% | |
Unloaded resonant frequency | X120/Y200/Z300 | Hz±20% | |
Unloaded Step time | 10 | ms±20% | |
Load capacity | 0.8 | kg | |
El. capacitance | 11/axis | μF±20% | |
Operating temperature[1] | -20~80 | ℃ | |
Material | Aluminum |
| |
Size(L×W×H) | 100×100×57.5 | mm | |
Mass | 220 | g±5% | |
Cable length[2] | 1.5 | m±10mm | |
Note: Technical data are measured by CoreMorrow E00/E01 series piezo controller. Max driving voltage could be -20V~150V, 0~120V is recommended for long-term and high-reliable operation.Unless otherwise specified, the above parameters are measured at room temperature about 25°C.
[1] Custom ultralow temperature and ultrahigh vacuum versions are available.
[2] Custom cable length and connector is available.
Note: The parallelism of the moving platform is about 20μm, and the roughness is about 1.6 to 3.2. Please contact the sales engineer for confirmation before purchase.
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