S21 high resolution piezo rotation stage with 7.5mrad travel and 0.2urad resolution for optics tilt positioner piezo stage

Product Overview

Description

 

 

Type	S-Closed loop	S21.R7S	Units
Active axis		θz
Rotation angle(0~+120V)		6(≈1240")	mrad±20%
Rotation angle(0~+150V)		7.5(≈1500")	mrad±20%
Integrated sensor		SGS
Resolution		0.2(≈0.04")	μrad
Closed-loop linearity		0.5	%F.S.
Closed-loop repeatability		0.2	%F.S.
Push/pull force		10/5	N
Stiffness		1	N/μm±20%
Unloaded resonant frequency		1.1	kHz±20%
Unloaded step time		30	ms±20%
Load capacity		0.1	kg
Operating temperature[1]		-20~80	℃
El. capacitance		1.8	μF±20%
Material		Aluminum
Mass		105	g±5%
Cable length[1]		1.5	m±10mm
Sensor/voltage connector[2]		LEMO

Note: Max driving voltage could be -20V~150V, 0~120V is recommended for long-term and high-reliable operation.Unless otherwise specified, the above parameters are measured at room temperature about 25°C.
[1] Custom ultralow temperature and ultrahigh vacuum versions are available.
[2] Custom cable length and connector is available.
Note: The parallelism of the moving platform is about 20μm, and the roughness is about 1.6 to 3.2. Please contact the sales engineer for confirmation before purchase.

E53.A2K Piezo Controller 2 channel Open loop Ave.current: 17mA

E53.C Piezo Controller 1 channel Open loop Ave.current: 60mA

XE-650.OW Piezo Controller 1 channel Open loop Ave.current: 50mA

 

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