CSS closed space sublimation coater for CdTe, sulfide and perovskite solar cell film

Power supply

220VAC,50Hz

Furnace structure and vacuum chamber

Dual heaters, two temperature controllers, dual-channel float flow meter, gas can be fed into the vacuum chamber

Vacuum chamber: quartz

Chamber size: 300*300

Vacuum flange made of 304 stainless steel

Vacuum flange

Flanges are sealed by double silicone O-rings, allowing vacuum pressures of 10E-2 Torr to be achieved with a mechanical pump, 10E-5 Torr with molecular pump

(The vacuum pump is optional according to needs, and additional charges are required)

Gas flowmeter

There are two float meters mounted on the control panel with measuring ranges:

16 - 160 mL/m

400 - 4000 mL/m (for cleaning purposes)

Heater and sample holder

Two sets of short-wave infrared lamps are used as heating elements for rapid heating;

The distance between the two heaters can be adjusted between 10 - 50 mm;

Heater made of stainless steel with water-cooled jacket for reduced heat radiation and rapid cooling;

5" round wafer holder with built-in top heater for substrate loading;

Includes a high thermal conductivity aluminum nitride plate (5" diameter x 0.5mm thick) which should be placed on the backside of the substrate to allow it to heat evenly

Temperature controller

Two precision digital temperature controllers, 30-segment programmable, for independent control of top and bottom heaters;

Each controller features PID auto-tuning to protect heaters from overshoot and alarm functions to avoid overheating and thermocouple disconnection

Install PC communication interface and software to record temperature curve

Temperature measuring element

Two K-type thermocouples, mounted on top and bottom, both in contact with aluminum nitride ceramic sheets

Working temperature

Maximum temperature per heater: <=800℃

Maximum temperature difference between two heaters: <=300℃ depends on the distance between the two heaters:

(1) Spacing 30mm max. Temperature difference: 315℃ heating bottom

(2) Spacing 40mm max. Temperature difference: 350℃ heating bottom

(3) Spacing 50mm max. Temperature difference: 395°C at the bottom of the heating only

Heating and cooling rate

Heating: <20ºC/ s (heating single heater only)

Cooling: <10ºC/ s (600-100 ºC) Max.

Cover Opening method

Electric lift upper cover

Water chiller

Flow rate: 10L/min