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Model | ME-300CNC | ME-400CNC | |
Table travel range(XYZ) | 300*300*150mm | 400*300*150mm | |
Dimension | 610*850*1600mm | 1000*800*1600mm | |
Resolution | 0.0001mm | ||
XY axis Accuracy | 1.5+L/200 um | ||
Y axis Accuracy | 2+L/200um | ||
Repeatability accuracy | 2um | ||
X.Y move style | Automatic(joystick and software) | ||
X,Y move speed | 0-100mm/s | ||
Z move style | Automatic focus(servo motor)+ Manual pulse focus(Min travel distance 0.1um) | ||
Z move speed | 0-20mm/s | ||
CCD | High-resolution 1.3M pixel digital color CCD | ||
Software | SBK-CNC | ||
Work-table loading | 20KG | ||
Illuminating system | Cold light source transmission lighting, 10W LED reflection lighting | ||
Nosepiece | Five-hole objective rotary table (with DIC slot) | ||
Optical eyepiece tube | Trinocular tube | ||
Eyepiece | WF 10X/22 | ||
Adaptor lens | 0.5X | ||
Magnification | Optical : 50X、100X、200X、500X, Image: 162.51X、314.95X、640.42X、1570.48X | ||
Metallographic Objective Lens (Bright & dark field ) | LWDPLAN 5X: (N.A) 0.14, working distance :10.8mm | ||
LWDPLAN 10X: (N.A) 0.25, working distance:10.0mm | |||
LWDPLAN 20X: (N.A) 0.40, working distance: 4.0 mm | |||
LWDPLAN 50X: (N.A)0.20, working distance: 2.0 mm | |||
Optical system | CSIC infinity correction optical system | ||
Power | 220V/50Hz/5A | ||
envirment requiry | temperature range:22±2℃,humidity range:30%-80% | ||





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