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Model | VSD 1621 | VSD 1821 | VSD 2527 | ||
Dimension | 1600X2100 | 1800x2100 | 2500x2700 | ||
Material | SUS304 stainless steel or carbon steel | ||||
Vacuum system | Rotary pump+Booster pump+Turbo pump (3.0*10-4Pa) | ||||
Working cycle | 50-100minutes/chamber,7m2/chamber | ||||
Process power | Imported MF power supply | ||||
Cooling system | POLY cold unit( reaching under 130°C), CHILLER | ||||
Control system | PLC and one touch screen | ||||
Remark | All can be designed according to customer's requests. |