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Polytype | 6H-SiC | 4H-SiC |
Crystal stacking sequence | ABCABC | ABCB |
Lattice parameter | a=3.073A , c=15.117A | a=3.076A , c=10.053A |
Band-gap | 3.02 eV | 3.27 eV |
Dielectric constant | 9.66 | 9.6 |
Refraction Index | n0 =2.707 , ne =2.755 | n0 =2.719 ne =2.777 |
Transmission range, μm | 0.12-7 |
Silicon Carbide Wafer Specification | ||
Polytype | 4H / 6H | |
Diameter | Ø 2″ / Ø 3″ / Ø 4″/Φ6″/Φ8″ | |
Thickness | 330 um ~ 350 um | |
Orientation | On axis <0001> / Off axis <0001> off 4° | |
Conductivity | N – type / Semi-insulating | |
Dopant | N2 ( Nitrogen ) / V ( Vanadium ) | |
Resistivity ( 4H-N ) | 0.015 ~ 0.03 ohm-cm | |
Resistivity ( 6H-N ) | 0.02 ~ 0.1 ohm-cm | |
Resistivity ( SI ) | > 1E5 ohm-cm | |
Surface | CMP polished | |
TTV | ≤ 15 um | |
Bow / Warp | ≤ 25 um | |
Grade | Production grade / Research grade | |





















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