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Specifications | ||
Symbol | Si | |
Atomic Number | 14 | |
Atomic Weight | 28.09 | |
Element Category | Metalloid | |
Group, Period, Block | 14, 3, P | |
Crystal structure | Diamond | |
Color | Dark gray | |
Melting Point | 1414°C, 1687.15 K | |
Boiling Point | 3265°C, 3538.15 K | |
Density at 300K | 2.329 g/cm3 | |
Intrinsic resistivity | 3.2E5 Ω-cm | |
No. | Items | Standard Specification | ||||||||||
1 | Size | 2" | 3" | 4" | 6" | 8" | 12" | |||||
2 | Diameter mm | 50.8±0.3 | 76.2±0.3 | 100±0.5 | 150±0.5 | 200±0.5 | 300±0.5 | |||||
3 | Conductivity | P or N or un-doped | ||||||||||
4 | Orientation | <100>, <110>, <111> | ||||||||||
5 | Thickness μm | 279, 381, 425, 525, 575, 625, 675, 725 or as required | ||||||||||
6 | Resistivity Ω-cm | ≤0.005, 0.005-1, 1-10, 10-20, 20-100, 100-300 etc | ||||||||||
7 | RRV max | 8%, 10%, 12% | ||||||||||
8 | Primary Flat/Length mm | As SEMI standard or as required | ||||||||||
9 | Secondary Flat/Length mm | As SEMI standard or as required | ||||||||||
10 | TTV μm max | 10 | 10 | 10 | 10 | 10 | 10 | |||||
11 | Bow & Warp μm max | 30 | 30 | 30 | 30 | 30 | 30 | |||||
12 | Surface Finish | As-cut, L/L, P/E, P/P | ||||||||||
13 | Packing | Foam box or cassette inside, carton box outside. | ||||||||||




















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