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RF Power Supply-MG-AG-1305
MG ® AG series all-solid-state RF power supply adopts the most stable and reliable power amplifier and DC modules currently available, so that the product provides extremely stable RF power output and the product is more robust and durable. The high quality of components and the small number of components maximize the reliability of the product and the life cycle of the equipment. At the same time provide a variety of models to choose from, each model has a specific combination of features and performance (2,4,13.56,27.12,40.68MHz,0.1-3KW, with a variety of user interfaces). The LCD display is a comprehensive and intuitive operating menu that can be used directly on the power control panel to provide unique ease of operation, improve operator efficiency, and minimize training costs.
Advantage:
Longer process uptime
Higher ease of operation and flexibility
Stable and reliable amplifier and DC module solutions
Long-term ease of use and cost savings
Perfect after-sales service and support
Features:
High efficiency - low calorific value
Communication: 15-pin and 25-pin two analog user port options, RS-232/485
Multifunctional front panel
Convenient and comprehensive operation menu
CEX (phase synchronization) operation mode
Perfect reflection power protection
Performance parameter | AG-1305 | AG-1310 | AG-1320 | ||
Signal frequency | 13.56MHz | ||||
Output Power | 5-500W | 5-1000W | 10-2000W | ||
Maximum reflected power | 100W | 200W | 400W | ||
Power stability | ±0.1% | ||||
RF output connector | N head | ||||
Machine efficiency | ≥75% | ≥65% | |||
Harmonic component | ≤-50 dBc | ||||
Supply voltage | Single-phase AC (187V-253V) Frequency 50/60HZ | ||||
Cooling method | Forced air cooling | Air-cooled + water-cooled | |||
Ambient temperature | -10℃ -- 40℃ | ||||
Communication Interface | DB15/DB25 analog interface, RS485/RS232 | ||||
Total Weight | 19.5kg | 26KG | |||
Overall size | 88 mm (H)×483 mm (W)×500 mm (D) Or customizable | 132 mm (H)×483 mm (W)×500 mm (D) Or customizable | |||

Automatic matcher
CY® AM series digital automatic matching device adopts the most advanced digital network matching platform. With our mature professional technical strength, AM automatic matching device combines the complex impedance of plasma with fast, accurate and repeatable methods. Match the tuning range you want. Compared to traditional analog tuning methods, digital tuning algorithms and stepper motor drives produce faster, more accurate and highly repetitive responses that always match the impedance point of the load.
Advantage | Features |
Increase productivity, increase production, and reduce production costs Long-term stable process time guarantee Easy to install and operate | Fast, accurate and repeatable impedance matching The best, directly applicable functions to meet the needs of a variety of applications Multiple power and frequency range |
Performance parameter | AM-1310 | AM-1315 | AM-1320 |
Frequency | 13.56MHz ±0.005% (27.12MHz\\40.68MHz ) | ||
Maximum transmission power | 1000w | 1500W | 2000W |
Reflected power (at maximum power) | <3w | <3w | <5w |
Maximum load current | 30ARMS | 30ARMS | 30ARMS |
Maximum load voltage | 7500VRMS | 7500VRMS | 7500VRMS |
Transmission efficiency | >90% | ||
Match time | 1~3s | ||
Main capacitor | Double vacuum capacitor | ||
Matchable impedance real range | 0~80Ω | ||
Matchable impedance imaginary range | -j200~~+j200 | ||
RF output connector | 50 Ω, L29, copper strip output, customizable | ||
Control interface | Automatic manual control window | ||
Cooling method | Air cooled | Air cooled | Air-cooled + water-cooled |
Supply voltage | Single-phase AC (187V-253V) Frequency 50/60HZ | ||
Weight | 7.5KG | 8KG | |
Size | 430mm(D)x220mm(W)x130mm(H)Or customizable | ||






RF generator is form a complete set of plasma power supply,it is composed by by the rf power source, impedance matching unit and the impedance of power meter
It is widely used for RF Sputtering, PECVD Chemical Vapor Deposition,and Reactive-ion Etching and etc.
We are a foreign trade company that specializes in laboratory equipment sales, and we are committed to providing high-quality laboratory equipment and solutions to customers worldwide. Since our establishment, we have always adhered to the business philosophy of "customer first, quality first," continuously innovating and optimizing our products and services to provide customers with the best shopping experience.
Our products mainly include ball mills, tablet presses, various laboratory sintering furnaces, cutting machines, grinding and polishing machines, plasma cleaning machines, plasma coating machines, magnetron sputtering systems, thermal evaporation coating machines, high-speed spin coaters, thin film coaters, electrospinning machines, glove boxes, battery equipment, etc., which provides excellent equipment for scientific research in the fields of chemistry, physics, materials, electronics, polymer engineering, new material preparation, and research and development. We have established long-term and stable cooperative relationships with globally renowned brands to ensure that our product quality and technological advantages are always in a leading position in the industry.
Our team is composed of experienced and high-quality professionals with a deep background in laboratory equipment sales and technology, capable of providing customized solutions to customers. Whether you are a research institution, a production enterprise, or a medical institution, we will provide you with the highest quality and most suitable laboratory equipment and services.
If you are looking for high-quality, high-performance lab equipment, please contact us, and we will wholeheartedly provide you with high-quality products and services.
1. Factory prices with the best quality.
2. One year free-of-charge maintenance for all the equipment
3. Customized service for special demand
4. Fast and flexible delivery, by sea, by air, by express
5. Quick response within 24 hours
How to order
1. If you are interested in our products, please tell us the model number and quantity.
2. We will make a proforma invoice for your order.
3. We will deliver the product ASAP on receipt of the payment
Guarantee
1. Guarantee for one year after shipment.
Payment
1.Telegraphic transfer
2.Western Union
3.Secure Payment through Alibaba
4.L/C
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damage part for you for free.
DELIVERY TIME:15-20 days after confirming order,detail delivery date should be decided according to production season and order quantity.
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