P77.30S micro stage piezo shifter and millisecond response for large aperture interferometer optical piezo stage
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- Supplier: Harbin Core Tomorrow Science And Technology Co. Ltd.
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Product Overview
Description
Type | S-Closed loop | P77.30S140 | Units |
Active axis | Z |
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Travel range(0~120V) | 12.8 | μm±10% | |
Travel range(0~150V) | 16 | μm±10% | |
Sensor | SGS |
| |
Aperture | Φ140 | mm | |
Resolution | 0.5 | nm | |
Pitch/yaw/roll | <15 | μrad | |
Push/pull force capacity | 80/15 | N | |
Unloaded resonant frequency | 200 | Hz±20% | |
Unloaded Step time | 14/7 | ms±20% | |
Load capacity | Lateral 5 | kg | |
El. capacitance | 14.4/28.8 | μF±20% | |
Operating temperature | -20~80 | ℃ | |
Material | Aluminum, steel |
| |
Size(L×W×H) | 210×210×56 | mm | |
Mass | 4200 | g±5% | |
Cable length | 1.5 | m±10mm | |
Sensor/voltage connector | LEMO |
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