P83 piezo micrometer and millimeter piezo stage with 13mm plus 100um travel, nano resolution, available multi axis versions

Model

S-Closed loop

P83.X25S

P83.X25K

Units

K-Open loop

Active axes

X

Travel rang

13mm+25µm

mm+µm

Material

Steel

Manual Adjustment - Micrometer

Travel rang

13

mm

Resoluiton

10

µm

Driving mode

Screw thread pair

Sensitivity

<2

µm

Least count

10

μm

Screw pitch

0.5

mm/rev.

Piezo Adjustment-Piezo

Travel rang

0~120 V

20

µm±20%

0~150 V

25

µm±20%

Sensor

SGS/-

Min step(resolution)

1.5/0.5

nm, typ.

Closed-loop linearity

0.2/-

%F.S.

Repeatability

0.1/-

%F.S.

Push force capacity

20

N

Stiffness

2

N/µm±20%

Load(Z axis)

500

g

Operating temperture

-20~80

°C

Electrical capacitance

1.8

µF±20%

Cable

1.5

m±10mm

Connector

LEMO