P63.X7K micro piezo linear stage driven by piezo actuator for nanometer cutting platform piezo nanopositioning stage X stage

Product Overview

Description

 

Type	K-Open loop	P63.X7K	Units
Active axis		X
Travel range(0~120V)		5.5	μm±10%
Travel range(0~150V)		6.8	μm±10%
Resolution		0.1	nm
Pitch/yaw/roll		<5	μrad
Push/pull force capacity		10/2	N
Stiffness		1.5	N/μm±20%
Unloaded resonant frequency		2000	Hz±20%
Unloaded Step time		0.3	ms±20%
Load capacity		0.8	kg
El. capacitance		0.8	μF±20%
Operating temperature[1]		-20~80	℃
Material		Aluminum
Size(L×W×H)		30×30×21	mm
Mass		70	g±5%
Cable length[2]		1.5	m±10mm

Note: Technical data are measured by CoreMorrow E00/E01 series piezo controller. Max driving voltage could be -20V~150V, 0~120V is recommended for long-term and high-reliable operation.Unless otherwise specified, the above parameters are measured at room temperature about 25°C.
[1] Custom ultralow temperature and ultrahigh vacuum versions are available.
[2] Custom cable length and connector is available.
Note: The parallelism of the moving platform is about 20μm, and the roughness is about 1.6 to 3.2. Please contact the sales engineer for confirmation before purchase.

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