Laboratory Plasma Magnetron Sputtering Coater with Three Sputtering Sources and RF/DC Power Supply Customizable
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- Supplier: Henan Mingguan Scientific Instruments Co. Ltd.
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Product Overview
Description
Plasma Magnetron Sputtering Coater with Three Sputtering Sources and RF/DC Power Supplies - VTC-600-3HD-LD
Product Description
VTC-600-3HD-LD is a combinatorial plasma sputtering system with three 2“ magnetron sputtering sources and three RF/DC power supplies. Such a sputtering system is capable of co-sputtering up to three different target materials and creates various composition profiles across the substrate (e.g. ternary materials for Li-ion rechargeable battery). This system is also suitable for sequential coating of multiple layer films such as ferroelectric, alloy, semiconductor, ceramic, dielectric, optical, oxide, hard, PTFE, etc.
SPECIFICATIONS
| · Single-phase 220 VAC 50 / 60 Hz · 2000 W (including a vacuum pump and water chiller) |
· Three sputtering power sources are integrated into one control box o DC source: 500 W power for coating metallic materials o RF source: 300 W power, 13.56 MHz frequency for coating non-conductive materials | |
| · Three 2 inches sputtering heads with water cooling jackets and shutters are included (Click 1st pic from left) o Target size requirement: 2" diameter o Thickness range: 0.1 - 5 mm for both metallic and non-conductive targets (including the backing plate) · Customized coater: Two DC - One RF; Two RF - One DC; Three DC; Three RF. · Optional: 148 cm RF cable can be ordered at extra cost for the replacement |
| · Vacuum chamber: 300 mm Dia. x 300 mm Height, made of stainless steel · Viewport: Two pieces of 100 mm Dia. glass. One fixed; one detachable for cleaning and replacement · Hinged type lid with pneumatic power pole allows easy target change |
| · The sample holder is a rotatable and heatable stage made of the ceramic heater with copper cover · Sample holder size: 140 mm Dia. for. 4" wafer max · Rotation speed: 1 - 20 rpm adjustable for uniform coating · The holder temperature is adjustable from RT to 500 °C max (2 hr max) with accuracy +/- 1.0 °C via a digital temperature controller |
Gas Flow Control | · Two precision mass flow controllers (MFC) are installed to allow inlet of two types of gases o Flow rate: 0 – 200 mL/min & 0 - 100ml/min adjustable on the touch screen control panel · Air inlet valve is installed for vacuum release |
Vacuum Pump Station | · High-speed turbopump at speed 80L/S is combined with a two-stage mechanical pump (220 L/min) for max vacuum level and faster pumping speed · Standard vacuum level connected with chamber: < 4.0E-5 Torr. · Optional at extra cost · If choose a 150L/S high-speed turbopump, the vacuum can reach 10-6 torr with the chamber. · For the ultra-high vacuum up to 10^-7 torr, 700S/L turbopump is needed · 150L/S high-speed turbopump |
Water Chiller | · One digital temperature-controlled recirculating water chiller is included. o Refrigeration range: 5~35 °C o Flow rate: 16 L/min o Pump pressure: 14 psi |
Optional | · Precise quartz Film Thickness Monitor is optional, which can be into the chamber to monitor coating thickness with an accuracy of 0.10 Å |
Overall Dimensions | Lid closed: 48" × 28" × 32" Lid open: 48" × 28" × 37" |
Net Weight of Coater | · 160 kg |
Shipping Weight & Dimensions | · Total 3 Pallets o 365 lbs, 48" x 40" x 45" o 390 lbs, 48"x 40" x 49" o 210 lbs, 48" x 40"x 30" |
Compliance | · CE approval |
Warranty | · One year's limited warranty with lifetime support |
Application Note | This coater may be placed into a standard glovebox with modification for thin-film battery research |
Product pictures
Company Profile
We are a foreign trade company that specializes in laboratory equipment sales, and we are committed to providing high-quality laboratory equipment and solutions to customers worldwide. Since our establishment, we have always adhered to the business philosophy of "customer first, quality first," continuously innovating and optimizing our products and services to provide customers with the best shopping experience.
Our products mainly include ball mills, lab pellet presses, various laboratory sintering furnaces, cutting machines, grinding and polishing machines, plasma cleaning machines, plasma coating machines, magnetron sputtering systems, thermal evaporation coating machines, high-speed spin coaters, thin film coaters, electrospinning machines, glove boxes, battery equipment, etc., which provides excellent equipment for scientific research in the fields of chemistry, physics, materials, electronics, polymer engineering, new material preparation, and research and development. We have established long-term and stable cooperative relationships with globally renowned brands to ensure that our product quality and technological advantages are always in a leading position in the industry.
Our team is composed of experienced and high-quality professionals with a deep background in laboratory equipment sales and technology, capable of providing customized solutions to customers. Whether you are a research institution, a production enterprise, we will provide you with the highest quality and most suitable laboratory equipment and services.
If you are looking for high-quality, high-performance lab equipment, please contact us, and we will wholeheartedly provide you with high-quality products and services.
Our Services
1. Factory prices with the best quality.
2. One year free-of-charge maintenance for all the equipment
3. Customized service for special demand
4. Fast and flexible delivery, by sea, by air, by express
5. Quick response within 24 hours
How to order
1. If you are interested in our products, please tell us the model number and quantity.
2. We will make a proforma invoice for your order.
3. We will deliver the product ASAP on receipt of the payment
Guarantee
1. Guarantee for one year after shipment.
Payment
1.Telegraphic transfer
2.Western Union
3.Secure Payment through Alibaba
4.L/C
Packaging & Shipping
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damage part for you for free.
DELIVERY TIME:15-20 days after confirming order,detail delivery date should be decided according to production season and order quantity.
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