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FOXIN-TG Series Multi-Arc lon Coating Equipment Model(Diameter less than 2m) | ||||||||||||||
Model | TG-1418 | TG-1620 | TG-1820 | TG-2021 | TG-2023 | TG-2040 | ||||||||
Vacuum Chamber | 中1400xH1800mm | 中1600xH2000mm | 中1800xH2000mm | 中2000xH2100mm | 中2000xH2300mm | 中2000xH4000mm | ||||||||
Application | Hardware industry, sanitary appliance industry, decoration industry, household appliances industry | |||||||||||||
Faucet, stair handrail, household appliances, LOGO signs, stainless steel frame, stainless steel parts and plate, etc | ||||||||||||||
Coating Film | Ti-Gold, Rose Gold, Champagne Gold, Japanese Gold, Bright Silver, Rainbow, Jewelry Blue, Rose Red, Black, etc. | |||||||||||||
Vacuum Chamber | Vertical door, hanging or horizontal cart structure, equip with pumping system and water cooling system | |||||||||||||
Vacuum System | Sustaining Pump + Mechanical Pump + Roots Pump + Diffusion Pump or Molecule Pump(specific model according to customers' requirements) | |||||||||||||
Vacuum | 1 set pirani, 1 set cold cathode, 1 set diaphragm gauge | |||||||||||||
Supply Type | DC power, MF power, pulse power(bias power, arc power) | |||||||||||||
Ultimate | 1.0- 6.0x10-4Pa, Non-loading cooling | |||||||||||||
Arc Source | 16-24 set | 16-24 set | 18-26 set | 18-26 set | 22-28 set | 22-32 set | ||||||||
200A-300A | 200A-300A | 200A-300A | 200A-300A | 200A-300A | 200A-300A | |||||||||
Bias Power | 40KW/1 | set | 40KW/1 set | 40KW/1 set | 50KW/1 set | 50KW/1 set | 60KW/1 set | |||||||
Magnetron Power Supply | 1-2 | set | 1-2 set | 2-3 set | 2-3 set | |||||||||
Rotation | Multi-axis planetary with frequency control(can be controlled and adjusted) | |||||||||||||
Baking | Normal temperature ~ 300C can be controlled and adjusted(PID temperature control) | |||||||||||||
Gas | 3 or 4 ways working gas flow control and display system matched with auto gas adding system | |||||||||||||
Ar, Nz, O₂, CH,etc. | ||||||||||||||
Cooling Method | Water cooling circulation, equip with industrial cooling tower or industrial water chiller(refrigerating machine) or cryogenic system.(customers provide) | |||||||||||||
Controlling | Manual, half-auto, auto, touch screen operation, PLC or computer controlled | |||||||||||||
Supply Index | Air Pressure 0.5-0.8MPa, Water Temperature≤25 C ,Water Pressure >0.2MPa | |||||||||||||
Warning | Alarming system will work when hydropenia, over-voltage, circuit break such abnormal situation happens and carry out related protect solution and electric interlock. | |||||||||||||
Total Power | 100~125KW | 125~145KW | 145~165KW | 165~185KW | 185~200KW | 200KW | ||||||||
Output | Voltage 220V, Frequency 50Hz(equip as customers' national electricity standard) | |||||||||||||
Occupation | 1 5~50m? | 15~50m? | 25~55m2 | 25~55m2 | 35~55m2 | 35~55m? | ||||||||
Remark | Design and produce special machine according to customers' require, can add magnetron sputtering target,MF twins target,etc. | |||||||||||||




















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