Lab New Design PVD Dual Target High Vacuum 2 Inch Magnetron Sputtering Coater
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- Supplier: Zhengzhou Tainuo Film Materials Co. Ltd.
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Product Overview
Description
Lab New Design PVD Dual Target High Vacuum 2 Inch Magnetron Sputtering Coater
Product Description
Lab New Design PVD Dual Target High Vacuum 2 Inch Magnetron Sputtering Coater
Compared with the conventional plasma sputtering, magnetron sputtering has the advantages of high energy, high speed, high deposition rate and low sample temperature rise. The magnetron target is equipped with water-cooled interlayer. The water cooler can effectively take away heat and avoid heat accumulation on the target surface, so that the magnetron coating can work stably for a long time.
MAGNETRON SPUTTERING: OVERVIEW
Sputtering is a plasma based deposition process in which energetic ions are accelerated towards a target. The ions strike the target and atoms are ejected (or sputtered) from the surface. These atoms travel towards the substrate and incorporate into the growing film.
Magnetron sputtering coating equipment is a special laboratory coating instrument developed by our company. The equipment can be equipped with DC power supply and RF power supply. The power ranges from 500W to 1000W. It can be used to prepare single or multilayer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, etc.
Specifications of magnetron sputtering coater
| product name | Dual-target DC magnetron sputtering coater |
| Sputtering power supply | DC power supply×2 DC power supply:500W |
| Vacuum chamber | Chamber size:φ300mm×300mm,Chamber materia:Stainless steel Watch window: φ100mm The cavity opening method adopts top opening, which makes it easier to change the target |
| Magnetron Sputtering target head | There are 2 magnetron sputtering heads installed in the instrument, and they are all equipped with a water-cooled interlayer, which can pass in cooling water to cool the target material. The two sputtering heads are connected with a DC power supply, and the main sputtering conductive |
| Sample stage | Sample carrier size: 140mm dia. (Maximum 4" substrate can be placed) The sample carrier can be rotated at a speed of: 1-20 rpm (adjustable) The highest heating temperature of the sample carrier is 500ºC, and the temperature control accuracy is +/- 1.0 °C |
| Gas flow controller | There are 2 mass flow meters installed inside the instrument, the range is: 0-200sccm |
| Vacuum pump | Equipped with a set of molecular pump system, using one-button operation 80L/S |
| Cooling system | 16L/min. |
| Voltage | 220V 50HZ |
Detailed pctures of magnetron sputtering coater
1. WE have magnetron sputtering coater with 1 target, 2 targets, 3 targets, target can be designed at the
top or bottom of the chamber.
2. DC & RF power target is available.
3. Different target material is optional
4. Strong magnetic target and Pernanent magenetic target is optional
5. Magnetron sputtering coater with evaporation source is available
6. Customized magnetron sputtering coater according to your requirements is Ok
PVD desk magnetron spuutering coater (1/2/3 target)
PVD vertical single target sputtering coater
PVD dual target magnetron sputtering coater
PVD triple target magnetron sputtering coater
PVD triple target magnetron sputtering coater with transfer chamber
PVD magnetron Sputtering coater with evaporation source
Company Information
Packaging & Shipping
We can ship the magnetron sputtering coater by sea, by air, by Express, by land, also can arrange shipment according to your requirements
FAQ
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
Contact Us
IS MAGNETRON SPUTTERING THE RIGHT PROCESS FOR YOUR WORK?
Please get in touch and we can collaborate on your project.
How can we help you achieve your goals? What technical obstacles can our engineering team help you overcome? Please press the 'Get in Touch' button to get in contact with us, we'd be excited to hear about your research and help you in any way we can
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