Three target magnetron sputtering coater with a transition chamber
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- Supplier: Zhengzhou Tainuo Film Materials Co. Ltd.
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Product Overview
Description
Three target magnetron sputtering coater
with a transition chamber
Product Description
The three targets magnetron sputtering coater apparatus can be used for the preparation of metal thin films. It has applications in the fields of electronics, optics, and special ceramic preparation. It can also be used for laboratory SEM sample preparation.
The three target magnetron sputtering coater is equipped with three magnetron targets and two sets of DC power supplies, which can be used to coat multilayer conductive metal films. At the same time, the equipment has two parts: a main chamber and a transition chamber. The transition chamber is equipped with a magnetic push rod, and a vacuum gate valve is installed between the two chambers; The user can load samples in the transition chamber while performing sputtering work in the main chamber, and perform vacuum pre-pumping. After the sputtering in the main chamber is completed, the sample can be pushed into the sample stage of the main chamber through the magnetic push rod. Such a design can reduce the number of vacuum pumping times in the main chamber, which not only effectively saves time, but also ensures a better local vacuum and effectively improves the quality of the coating.
Product Parameters
Working Voltage | l VAC 220, 60Hz | |
Sputtering Vacuum Chamber | l Dimension: ~ φ325xH510mm l Material: 304 stainless steel l Inner wall processing: electrolytic polishing l Sealing method: Fluorine rubber seal l Viewport (window): ~4'' (100mm) with shutter | |
Sample Holder | l Center bottom setting sample holder, with one shutter l Sample holder: Dia. 150mm l Rotary speed: 0~20rpm adjustable l Heating temperature: RT~ 500oC | |
Magnetron Sputtering Gun | l Quantity: 3 sets l Adjustable angle -45°~45° l Sputtering orientation downwards l Target dimension: diameter 2'', thickness max.3mm | |
Quartz Crystal Monitor | l Channel numbers: One-channel l Accuracy: 0.1Ã l Measurement speed: 100mS-1S adjustable l Measurement range: 500 000Ã (Aluminum as a reference) l Standard sensor quartz crystal: 6MHz | |
Vacuum System | Backing Pump | l Double-stage rotary vane pump l Pumping rate: 1.1L/s |
Molecular Pump | l Pumping rate: 600 L/s l Rated rotating speed: 27000rpm l Starting time: <5min l Cooling method: water cooling l Vacuum degree: 5*10-4Pa | |
Composite Vacuum Gauge | l Resistance gauge + ionization gauge l Measuring range: 10-5Pa ~ 105 Pa | |
DC Power Supply | l Quantity: 2 sets l Output power: 0~500W l Output voltage: 0~600V l Maximum output current: 1A l Starting time: 1~10s | |
RF power supply | l Quantity: 1 set l Output power: 0~500W l RF frequency: 13.56 MHz l Matching method: automatch l Reflected power: 100W l Power stability: ±0.1% | |
Mass Flow Controller | l One-channel MFC for Ar gas l Measuring range: 0~200sccm | |
Water Cooler | l Flow rate: 10L/min l Power: 0.1KW l Cooling power: 50W/℃ l Tank capacity: 9L | |
Control | l PLC automatic control | |
Transition chamber | l The chamber size will be for max. 4inch wafers. l Equipped with one compact molecular pump group l Backing pump: VRD-4, pumping speed: 1.1L/s l Model of molecular pump: TG60F l Pumping speed of molecular pump: 60L/s | |
Detailed Photos
FAQ
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have our own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
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