Thin film growing furnace small lab PVD coating furnace machine Mini CVD Tube furnace

Product Overview

Description

Thin film growing furnace small lab PVD coating furnace machine Mini CVD Tube furnace 

 

Product Description :

The heating element of the CVD system uses molybdenum resistance wire (used below 1200℃).

CVD tube furnace is composed of gas supply system, heating system, vacuum system, etc.

1) The total length of the temperature zone is 1000mm, and the constant temperature zone is 600mm;

2) The vacuum system is low vacuum, the maximum limit vacuum can reach 1Pa, and the high vacuum unit (diffusion pump or molecular pump unit) can also be selected;

3) The gas supply system is a mass flow meter, and the number of mixed gas routes is mixed in 4 ways (mainly selected according to customer process requirements).

 

 

 Application:

CVD system is to produce chemical reaction using a mixture of gaseous compounds on the substrate surface, thus generating non-volatile coating on substrate surface, a kind of thin film material preparation system. It consists of vacuum tube furnace,multi-channel pneumatic system and vacuum system. CVD growth systis suitable for the CVD process, such as silicon carbide coating, ceramic substrate conductivity test, controlled growth of ZnO nanostructures, such as ceramic capacitors(MLCC) atmosphere sintering experiment.

 

Technical parameter
Heating zone length	The total length of heating zone is 1000mm, and the constant heating zone is 600mm.
Tube Material	High quality quartz tube OD : Ø100mm
Max. temperature	1200°C   (<2 hours)
Working temperature	≤1150℃ (continuous)
Temprature control	1) PID automatic control via SCR (Silicon Controlled Rectifier)power control with phase angle fired, current limiting resistor. intelligent 50-stage temperature control system 2) Built in PID Auto-Tune function with overheating & broken thermocouple broken protection.   3) Over temperature protection
Heating rate	0-20 oC /min
Thermocouple	k type
Temperature accuracy	+/- 1 oC
Advantage	High purity alumina fibrous insulation for max energy saving
Furnace structure	Double layer steel casing with dual cooling fan, temperature of furnace shell below 60oC
Thick Furnace Insulation	Three layers of ceramic fiber insulation materials.     no pollution for sintering material
Max. vacuum	1Pa
Measuring vacuum	Capacitance vacuum gauge
Gas control	Float flow meter/Mass flow meter
Vacuum unit	Rotary vane/Diffusion/Turbo molecular pump

 

Detailed Pictures :

 

 

 

Packing & Delivery :

 

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FAQ                                                     

1. Are you furnace manufacturer ? 

A: Yes, we are professional lab furnace manufacturer with many years of sale and production experience in China.

 

2. Q:What kind terms of payment can be accepted?

    A:  D/P , T/T, Western Union, Paypal, etc.

 

3. Q: Could I ask for customized voltage and electricity plug ?

    A: Yes,we can custom-made according to our clients demands from different countries . 

 

4. Q: What about the delivery time?

    A: Normally 15-20 days prouction time after received advance payment or based on order quantity and arrange production schedule.

 

5. Q: What about the guarantee period?

    A: The furnace guarantee period is one year , and could supply technical support and service  for free all the time .

 

6. Q: What is your advantages?

    A: Professional and economical technical Proposal , Excellent quality and service ,and fast & reliable delivery .