VTC 50A Laboratory Automatic Digital Spin Coater/vacuum Spin Coater For Glue Spin Coating

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Product Overview

Description


VTC-50A Laboratory High-speed Benchtop Semiconductor spin coater: 8000 RPM, 4" Wafer Capacity 



Product Description


 


VTC-50A Spin Coater adopts independent power supply systems for motor part and control part, and the speed control system adopts single-chip microcomputer with high anti-interference to control, so that the rotation speed is very high and stable in the range of 1000-8000RPM. The coater has two stages during operation, namely T1 stage at low speed time and T2 stage at high speed time.


 


Spin coater,also known as glue slinger, rotary coateris mainly used for film preparation in wafer photoresist coating or sol gel experiment. The basic principle of a spin coater is to drip various types of glue onto a high-speed rotating substrate using centrifugal force to evenly coat the glue on the substrate. The thickness of the film is related to the viscosity of the glue, the viscosity coefficient between the glue and the substrate, the number of revolutions, and the spin coating time [1]. Generally, when the rotational speed is above 2000rpm, the majority of the colloids can be evenly distributed, The stability and repeatability of the spindle speed are the key factors determining the uniformity and consistency of the adhesive film thickness,.


 


The uniform glue machine is mainly used in the fields of micro processing, biology, materials, semiconductors, plate making, new energy, thin films, optics, and surface coating in micro electromechanical systems, or in the coating of substrates with small samples that cannot be coated by pulling or scraping. There are usually two ways to fix the sample: a vacuum suction cup to fix the sample, and a sample disk with a slot to fix the sample. When using a vacuum suction cup to fix the sample, a vacuum suction device is required. Vacuum adsorption is suitable for fixing substrates with smooth surfaces, good flatness, and no deformation due to vacuum suction; Sample trays with card slots can be used for fixing soft, irregularly shaped, and large-sized substrates.


 


Main Features


 


1. It adopts cast aluminum shell structure and acrylic upper cover for clear observation over the coating process.


2. A single-chip microcomputer with high anti-interference is used for control, and the operation is stable at high speed.


3. English operation interface


4. The sample is fixed onto a special polypropylene sample chuck, which does not need vacuum adsorption or bonding to fix the sample. With this simple fixing method, the substrate will not be deformed and there is no damage to the substrate. Slots of different shapes and sizes are opened in the center of the template to fix the substrate according to the shape and size of the substrates.


5. The glue injecting and glue leveling process is controlled independently to ensure the uniformity of the film layer after coating.


 


Technical Parameters


 


























Product Name



VTC-50A Spin Coater



Product model



VTC-50A



Installation Conditions



This equipment is required to be used at an altitude of 1000m or less, a temperature of 25℃±15℃, and a humidity of 55%Rh±10%Rh.


1. Water: equipped with water inlet and outlet


2. Electricity: AC220V 50Hz, must have good grounding


3. gas: N/A


4. Workbench: size 600mm×600mm×700mm, bearing more than 50kg


5. Ventilation device: NOT needed



Main Parameters


(Specification)



1. AC220/110V 50/60Hz


2. Power: 150W


3. Rotation speed: 500rpm-8000rpm


4. A two-step coating program can be set, and the speed stability is ±1%, making the coating more uniform.


    SPD1 rotation speed: valid with 500-8000RPM


    T1 time: valid with 1--60s


    SPD2 rotation speed: valid with 500-8000RPM


    T2 time: valid with 1--60s


5. The diameter of the sample plate: 100mm


6. The ambient temperature is 5 to 40℃, the relative humidity is not more than 85%RH, and there is no strong vibration source or corrosive gas around the equipment.



Product Dimension and Weight



Dimension: 260mm (length) × 380mm (width) × 330mm (height)


Weight: 20kg 



 


Standard Accessories


 































No.



name



qty



1



PP Sample Clamp plate (with 55×55mm sample slot)



1 pcs



2



Resin Base Plate



1 pcs



3



Syringe



1 pcs



4



Template



5 pcs



 





Product pictures


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Our Services


1. Factory prices with the best quality.


2. One year free-of-charge maintenance for all the equipment


3. Customized service for special demand


4. Fast and flexible delivery, by sea, by air, by express


5. Quick response within 24 hours


 


How to order


1. If you are interested in our products, please tell us the model number and quantity.


2. We will make a proforma invoice for your order.


3. We will deliver the product ASAP on receipt of the payment


 


Guarantee


1. Guarantee for one year after shipment.


 


Payment


1.Telegraphic transfer


2.Western Union


3.Secure Payment through Alibaba


4.L/C





Packaging & Shipping


PACKAGE:


     1 Standard exported package: Internal anticollision protection, external export wooden box packaging.


     2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.


     3 Responsible for the damage during the shipping process, will change the damage part for you for free.


 


DELIVERY TIME:15-20 days after confirming order,detail delivery date should be decided according to production season and order quantity.


 


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