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BAORUI Series Parameters | ||||||||||
Model | IF-12515 | MAIF-1820 | MAIF-2323 | MAT-2345 | MAT1-2368 | |||||
Chamber Size(mm) | D1250×H1500 | D1800×H2000 | D2300×H2300 | D2300-2500*H4500 | D2300-2500*H6800 | |||||
Pumping System | Mechanical Pump +Roots Pump+Diffusion Pump+Maintenance Pump | |||||||||
Arc | 10 | 18 | 22 | 40-42 | 58-62 | |||||
Arc Power | 200A | |||||||||
Bias Power | 30KW--120KW | |||||||||
Gas | Ar、N₂、C₂H₂、O₂ | |||||||||
Cooling | Water cooling circulation,equip with Industrial cooling tower or Industrial water chiller(refrigerating machine)or cryogenic system.(customers provide) | |||||||||
Vaccum Index | Extract time (no load cold state):from atmosphere to 9.9×10―³Pa≤10min | |||||||||
Ultimate Vaccum | Superior to 5.0×10―⁴Pa | |||||||||
Pressure Rising | New machine cold state air leaaking rate≤0.5Pa/h | |||||||||
Running Power | According to specific configuration | |||||||||
Output Frequen | Custom made | |||||||||
Occupation | 10 | 15 | 18 | 50 | 75 | |||||
Accessory | Oven,Water Tower,Water Pump,Air Compressor,Jig Rack,Water Tank or Pool | |||||||||
Remark | All configuration can be custom made | |||||||||






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