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Product name | Vacuum plasma cleaning machine |
Intermediate frequency power supply | 40KHz |
Gas Used | Ar、O₂、N₂、H₂、CF₄(optional) |
Cavity Volume | Customizable |
Customizable | PLC |
RF power supply Power:0~600 WFR:13.56MHz | |
Mid power supply Power:0~2000 WFR:40KHz | |
Chamber size | 375X375X430mm(WXHXD) |
Chamber thickne | 25mm |
Chamber material | Aluminum alloy(Stainless steel chamber can be customized) |
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