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This equipment is a desktop single sputter head magnetron sputtering coating machine. The miniaturized design of the equipment limits the appearance of the equipment to the desktop level, greatly reducing the installation site requirements. The equipment is equipped with a DC power supply, which can be used for sputtering metal materials and has the characteristics of fast speed and low temperature rise.
Sample stage | Size | φ100mm |
Heating | Max. 500℃ | |
Rotating speed | 0-20rpm adjustable | |
Magnetron sputtering head | Quantity | 2" x2 |
Vacuum chamber | Chamber size | φ180mm x 215mm |
Observation window | Omnidirectional transparent | |
Chamber material | SS | |
Open method | Upper cover removable | |
Vacuum system | Mechanical pump | Rotary vane pump |
Pumping port | KF16 | |
Exhaust interface | KF16 | |
Molecular pump | Turbomolecular pump | |
Pumping port | KF40 | |
Exhaust interface | KF40 | |
Vacuum measurement | Resistance gauge + ionization gauge | |
Ultimate vacuum | 1.0E-4Pa | |
Power supply | AC 220V 50/60Hz | |
Pumping rate | Mechanical pump 1.1L/s Molecular pump 600L/s | |
Power configuration | Quantity | DC power supply 1 SET |
Max. output power | DC power supply 300W | |
Supply voltage | AC220V, 50Hz | |
Others | Total power | 2kW |
Overall size | 550mm x 350mm x 400mm |
Deatailed pictures:


Magnetron Plasma Sputtering Coater





Zhengzhou CY Scientific Instrument Co., Ltd.- is a high and new technology enterprise registered in Zhengzhou,Henan province. Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in researching and developing, designing and manufacturing of equipment used in scientific researches.
Our mainly products include high temperature furnace and heating element, like lab muffle furnace, tube furnace, dental furnace, vacuum furnace,gold melting furnace, SiC heating element, MoSi2 heating element, alumina tubes and crucibles, and etc.



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