Hot filament chemical vapor deposition system /mosir heating elements CVD systems
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- Supplier: Zhengzhou,Protech,Technology,Co.,Ltd.
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Description
Zhengzhou Protech Furnace Co., Ltd is one professional supplier of high temperature furnace and heating element, like lab muffle furnace, tube furnace, dental furnace, vacuum furnace,, gold melting furnace, SiC heating element, MoSi2 heating element, alumina tubes and crucibles, and etc.
We have rich experience in the various thermal applications fields, especially on the high temperature lab furnace and heating elements researthing and developping working, which earn us a sound reputation among our product users and clients.
CVD (Chemical vapor deposition, referred to as CVD) is a chemical reaction in the reaction mass gaseous conditions, form a solid substance is deposited in the heated surface of the solid substrate, and thus technology to obtain a solid material. It belongs to the category of essentially gaseous atomic mass transfer process. As opposed to a physical vapor deposition (PVD)
Chemical vapor deposition is a new technology developed in recent decades preparation of inorganic materials. Chemical vapor deposition method has been widely used to purify substances, development of new crystals, various deposition monocrystalline, polycrystalline or glassy inorganic thin material. These materials may be oxides, sulfides, nitrides, carbides, and may be III-V, II-IV, IV-VI family room dihydric or polyhydric compound elements, and their function can be physical vapor precise control of doping deposition process. Currently, chemical vapor deposition has become a new field of inorganic synthetic chemistry.
CVD furnace Main components:
1. The MiNi type tubular furnace;
2.Three road float gas ratio;
3.Vacuum pump;
4. The thick wall silicone tube vacuum piping
1200.C Single Temperature range Mini 3 road gas CVD system technical parameters
1 | Name | 1200.CSingle Temperature range Mini 3 road gas CVD system |
2 | Model | PT-O1200-50IC80-D3FJ |
3 | PT-O1200-60IC80-D3FJ | |
6 | Champer type | Open type |
7 | Display mode | Touch screen
|
10 | Limiting temperature | 1200.C |
11 | Working temperature | ≤1150.C |
12 | Heating rate | ≤20.C(suggestion:10.C/min) |
13 | Heating zone | Single |
14 | Heating zone length | 220mm |
15 | Constant temperature district | 110mm |
16 | Furnace tube material | High purity quartz |
17 | Routine furnace tube diameter | 50mm |
18 | 60mm | |
21 | The furnace tube length | 700mm |
22 | Packing type | Stainless steel vacuum flange |
23 | Gas tightness | Vacuum flange and corundum furnace tube up to4.03×10-3Pa |
24 | Control mode | PID Temperature control |
25 | Temperature control accuracy | ±1.C |
33 | Temperature measurer
| K-Thermocouple
|
34 | Electrical certification | CE |
35 | Power supply | 220V 50Hz~60Hz |
36 | Total power | 2.5KW |
37 | Gas channels | Three kinds of gas source can be attached |
38 | The flow meter | Float flowmeter |
39 | A road range | 10~100ml/min |
40 | B road range | 16~160ml/min |
41 | C road range | 25~250ml/min |
42 | Pneumatic pressure | -0.1~0.15 MPa |
44 | Warranty | 12 months warranty, lifetime warranty |
46 | Accessories included
| Quartz tube, vacuum flange, furnace tube jam, type O sealing ring, protective gloves, crucible furnace hook, specification, ptfe tube, stainless steel card sets of joints, stainless steel bellows, KF adapter, 5 mm Allen wrench |
47 | The size of a complete set | L:700mm;E:600mm;H:1190mm |
Contact :Anna Liu
Skype:protechsales03
Mob.:86-18137195605
Tel:86-0371 67103035
QQ:535221892
We have 8 years leading factory here.Steady supplier for many renowned company.It will be our honor to supply you in long time.Let us know if there is anything I can do for you.You can leave an inquiry as below:
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