Single zone Coupled plasma CVD furnace diamond growth equipment

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Product Overview

Description


KJ-OTF-1200X-4CLV-PE is a CE certified compact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 500W RF plasma source, 2" or 3.14" O.D optional split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high quality mechanical pump. The PE-CVD furnace is an ideal and affordable tool to deposit thin films or grow nano-wire from a gas state (vapor) to a solid state, and benefits:

Lower temperature processing compared to conventional CVD.

Film stress can be controlled by high/low frequency mixing techniques.

Control over stoichiometry via process conditions.

Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.

 

Split Tube furnace

Horizontal PECVD coating furnace for high process performance Split vertical tube furnace
 
  • 1200oC Max. working temperature for < 60 minutes
  • 1100oC Max for continuous heating
  • 30 segments programmable precision digital temperature controller
  • 440 mm length single heating zone and 150 mm length constant

temperate zone

  • High purity quartz tube optional from ( click optional bar to choose )
    One pair of vacuum sealed flange with valves
    • 2"OD x 1.7"ID x  48" Length 
    • 3.14"OD x 2.83"ID x 48'' Length
  • Input power: 208 – 240V AC input, single phase at max. 4KW
  • Two zone split furnace -OTF1200X-II  is optional at extra cost
Plasma RF Power 
supply
 Horizontal PECVD coating furnace for high process performance Split vertical tube furnace
  • Output Power:          5 -500W adjustable with ± 1% stability
  • RF frequency:          13.56 MHz ±0.005% stability
  • Reflection Power:     200W max.
  • Matching:                Automatic
  • RF Output Port:       50 Ω, N-type, female
  • Noise:                    <50 dB. 
  • Cooling:                  Air cooling.
  • Power :                   208-240VAC, 50/60Hz
  • Note:                      This RF power supply can accept 50 - 80 mm

Max. quartz tube  by changing flange

Anti-corrosive Pressure Gauge
Horizontal PECVD coating furnace for high process performance Split vertical tube furnace
  • 3.8x10-5 to 1125 Torr measurement range
  • Anti-corrosive, gas-type independent 
  • High accuracy and reproducibility at atmosphere for reliable

atmospheric pressure detection

  • Fast atmospheric detection eliminates waiting time and shortens

process cycle

  • Easy to exchange plug & play sensor element
  • Click pic to view detal spec.
         
  Vacuum Pump and valve
 Horizontal PECVD coating furnace for high process performance Split vertical tube furnace
  • Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with

Two Stage Exhaust Systeminstalled in bottom case with max. vacuum

 pressure 10-2 torr.

  •  KFD25 adapter and stainless steel pipe are connected between pump

and tube flange with precision ball valve

  •  Digital vacuum pressure gauge and display are installed with the furnace
Optional Oiless Pump
Please order the oiless pump for zero contamination:

Mass Flow meters

Horizontal PECVD coating furnace for high process performance Split vertical tube furnace
     

  • Four precision mass flow meters (0.02% accuracy)
  • with digital display are installed on the bottom case to control gas

flow rate automatically.

  • MFC 1: Gas flow range from 0~100 sccm
  • MFC 2&3: Control range from 0~200 sccm  
  • MFC 4: Control range from 0~500 sccm
  • One gas mixing tank is installed on bottom case with liquid release valve
  • 4 stainless steel needle valves is installed on left side of bottom

case to control 4type gases mixing manually

  • Gas inlet fitting: four 1/4NPS
  • Gas outlet fitting: four 1/4NPS
Optional
 

Four channel Gas flow can be integrated into one PLC with

touch screen panel to control at extra cost
 

Overall dimensions
  • Furnace: 550mm(L) x 380mm(W) x 520mm(H) 
  • Bottom Mobile case together: 1200mm(L) x 1200mm(W) x 1200mm(H)
  • Net weight: 220 lbs
  • Shipping weight: 350 lbs
Warranty 
One year.


Compliance
  • CE Certified

 

 Horizontal PECVD coating furnace for high process performance Split vertical tube furnaceHorizontal PECVD coating furnace for high process performance Split vertical tube furnaceHorizontal PECVD coating furnace for high process performance Split vertical tube furnaceHorizontal PECVD coating furnace for high process performance Split vertical tube furnaceHorizontal PECVD coating furnace for high process performance Split vertical tube furnace

Horizontal PECVD coating furnace for high process performance Split vertical tube furnace

1. Are you a manufacturer or trade company ?

Yes,you can assured that we are a producer with full experience 

doing business in domestic and oversea.

2. We are not professional for operation and installation of your machine?

While it is not a stumbling block,our machine is easy to operate,no need

 to professional training,and the instruction manual and vedio sent to you 

are enough.What’s more,we have professional engineers and they can solve all questions.

3. How about packaging ?………….if machine damaged,what should I do ?

Usually machine is packed with wooden case and standard export carton,

plywood carton or as your requirement.Damage haven’t happened before,if happen,

we will arrange replacement.

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