Single zone Coupled plasma CVD furnace diamond growth equipment

• 1200^oC Max. working temperature for < 60 minutes
• 1100^oC Max for continuous heating
• 30 segments programmable precision digital temperature controller
• 440 mm length single heating zone and 150 mm length constant

temperate zone

• High purity quartz tube optional from ( click optional bar to choose )
  One pair of vacuum sealed flange with valves
  • 2"OD x 1.7"ID x  48" Length 
  • 3.14"OD x 2.83"ID x 48'' Length
• Input power: 208 – 240V AC input, single phase at max. 4KW
• Two zone split furnace -OTF1200X-II  is optional at extra cost

• Output Power:          5 -500W adjustable with ± 1% stability
• RF frequency:          13.56 MHz ±0.005% stability
• Reflection Power:     200W max.
• Matching:                Automatic
• RF Output Port:       50 Ω, N-type, female
• Noise:                    <50 dB. 
• Cooling:                  Air cooling.
• Power :                   208-240VAC, 50/60Hz
• Note:                      This RF power supply can accept 50 - 80 mm

Max. quartz tube  by changing flange

• 3.8x10^-5 to 1125 Torr measurement range
• Anti-corrosive, gas-type independent 
• High accuracy and reproducibility at atmosphere for reliable

atmospheric pressure detection

• Fast atmospheric detection eliminates waiting time and shortens

process cycle

• Easy to exchange plug & play sensor element
• Click pic to view detal spec.

• Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with

Two Stage Exhaust Systeminstalled in bottom case with max. vacuum

 pressure 10^-2 torr.

•  KFD25 adapter and stainless steel pipe are connected between pump

and tube flange with precision ball valve

•  Digital vacuum pressure gauge and display are installed with the furnace

Mass Flow meters

• Four precision mass flow meters (0.02% accuracy)
• with digital display are installed on the bottom case to control gas

flow rate automatically.

• MFC 1: Gas flow range from 0~100 sccm
• MFC 2&3: Control range from 0~200 sccm  
• MFC 4: Control range from 0~500 sccm
• One gas mixing tank is installed on bottom case with liquid release valve
• 4 stainless steel needle valves is installed on left side of bottom

case to control 4type gases mixing manually

• Gas inlet fitting: four 1/4NPS
• Gas outlet fitting: four 1/4NPS

Four channel Gas flow can be integrated into one PLC with

touch screen panel to control at extra cost
 

• Furnace: 550mm(L) x 380mm(W) x 520mm(H) 
• 2 Bottom Mobile case together: 1200mm(L) x 1200mm(W) x 1200mm(H)
• Net weight: 220 lbs
• Shipping weight: 350 lbs

• CE Certified