High Pressure Line Regulator

Athena manufacturers various kinds of Regulators. Athena Regulators have been designed to meet the demand of High Purity Corrosion Resistance Product Specially Suited for low level PPM Moisture

Two types of Cylinder Regulators available Brass Chrome Plated body with SS diaphragm and SS body with SS diaphragm.

High Flow Line Regulator

PIPE Size : 1/4" 1/2" 1" & 2"
Ultra high-purity stainless steel regulators for use with semiconductor applications.

• All semiconductor industry applications requiring precise pressure control.
LINE Dual-Stage Ultra High-Purity with Tied Diaphragms Regulator - SS Design Features

• 316 stainless steel with 316 stainless steel internals
• Dual tied seat design ensures regulator closure under extreme conditions
• 2” inlet and delivery pressure gauges
• Autogeneous butt-welded connections
• The seats are the only non-metallic components in the process stream
• Standard 10 Ra surface finish
• Sealed and ventable bonnets
• Helium leak tested to 1 x 10-9 scc/sec
• Assembled, tested and packaged in a Class 100 clean area

Specifications

• Maximum Inlet Pressure: 3000 psig (20,700)
• Maximum Flow Rate: 5 SCFM (150 SLPM) (At 3000 psig Inlet, N2)
• Flow Capacity (Cv): 0.05
• Operating Temperature: -40°F to 160°F (-40°C to 71°C)

• Porting: 1/4” VCR compatible

Materials of Construction

• Gauges: 316 stainless steel
• Body: 316 stainless steel
• Diaphragms: 316 stainless steel
• Linkages: 316 stainless steel
• Springs: 316 stainless steel

• Seals: Metal to metal