Ультрачистая серная кислота

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Product Overview

Description


Product Description

 

Electronic grade sulfuric acid is popularly known as ultra-pure sulfuric acid (UPS), is an extremely important kind of microelectronics chemical reagent. The Electronic grade sulfuric acid’s main characteristic is to effectively remove the impurity particles, inorganic residue, and carbon deposits on the wafer while cleaning and etching.

 

 

PROPERTY

 

CAS NO. ........................................ 7664-93-9

Chemical formula ............................... H2SO4

Molecular weight ................................. 98.08

Specific Gravity.................................1.3~1.8

UN number......................................  1830

Physical state...................................... Liquid

 

 

APPLICATION

 

Ultra pure sulfuric acid (UPS) of high purity chemicals are used mostly in electronics industry for cleaning and etching applications of semiconductors and printed circuit boards (PCB). This electronic grade sulphuric acid is specifically produced for applications in the electronic industry, such as the manufacture of printed circuit boards.

SPECIFICATION

  

 

TEST ITEMS

SPEC

RESULTS(mg/kg)

Sulfuric Acid

61.5%

Assay

61.5%±0.5%

61.5%

Appearance

Clear

Clear

Cl content

MAX. 4

ND

Cr

MAX. 2

0.015

Fe

MAX. 2

0.3

Ni

MAX. 2

0.04

 

 

CHEMICAL ANALYSIS

     ITEMS

UNIT

RESULTS

TEST METHOD

As

mg/kg(ppm)

0.104

Agilent ICP-OES

Cd

mg/kg(ppm)

0.007

Agilent ICP-OES

Cr

mg/kg(ppm)

0.016

Agilent ICP-OES

Cu

mg/kg(ppm)

0.012

Agilent ICP-OES

Fe

mg/kg(ppm)

0.325

Agilent ICP-OES

Ni

mg/kg(ppm)

0.040

Agilent ICP-OES

Pb

mg/kg(ppm)

0.021

Agilent ICP-OES

Zn

mg/kg(ppm)

0.159

Agilent ICP-OES

Al

mg/kg(ppm)

0.009

Agilent ICP-OES

 


0.0126 s.