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Vacuum Metallizing Plant/Metal Plating Vacuum Coating Machinery/PVD Magnetron Sputtering Coating Equipment
Vacuum magnetron sputtering coating machine is widely used in household appliances, clocks,lamps, crafts, toys, light reflector, phone keypad outer covering, instrumentation, plastics, glass, ceramics, tiles, decorative film and functional film.
Our company’s magnetron sputtering coating machine has many advantages such as good controllability and repeatability for film thickness, strong adhesion between substrate and film, special material film coating, mixed film,compound film and TiN imitation gold film making by different materials sputtering on products’ surface at the same time,high purity films etc..




| Model | CK-700 | CK-900 | CK-1000 | CK-1250 | CK-1400 | CK-1600 |
| Vacuum chamber size | D700×H 900mm | D900×H 1100mm | D1000×H 1200mm | D1250×H 1350mm | D1400×H 1600mm | D1600×H 1800mm |
| Power supply | Pulse bias power supply; DC magnetic power supply | |||||
| Vacuum chamber structure | Vertical single/double door, back vacuum acquisition system | |||||
| Vacuum chamber material | SS304 superior stainless steel | |||||
| Ultimate vacuum | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa |
| Pumping speed | From atmosphere to 6.7×10-3Pa spend 8~15min (unloading) | |||||
| Vacuum system | Diffusion pump + roots pump + rotary vane pump + holding pump (can be adjusted) | |||||
| Magnetic target type | Planar magnetic target, cylindrical magnetic target | |||||
| Pulse bias power supply | 25KW | 25KW | 30KW | 30KW | 40KW | 40KW |
| Rotation mode | Planetary revolution and rotation and frequency conversion speed regulation (controlled and adjustable, up-down rotation shelves, axes number is determined by actual situation) | |||||
| Process gas | Mass flow controller (3-4 road), manual or automatic filling system | |||||
| Cooling system | Water-cooling circulatory system,cooling water tower or industrial cooling water machine is also needed (supplied by customer) | |||||
| Control mode | Manual or PLC + touch screen, fully automatic | |||||
| Alarm and protection | Water pressure alarm, atmosphere pressure alarm, over current protection, related protective measures and electrical interlock functions. | |||||
| Cover area | W3m×L3.5m | W3m×L3.5m | W3.5m×L5m | W3.5m×L5m | W4.5m×L5.5m | W4.5m×L5.5m |
| Other data | Water pressure≥0.2MPa, water temperature≤25℃, atmosphere pressure 0.5-0.8MPa | |||||
| Remark | Specific configuration size can be designed according to customer requirements. Another power supply can be equipped such as IF power supply and arc power supply to meet the different requirements. Customized vacuum chamber size range is D 500-3000mm, H: 500-3000mm. | |||||



Qingdao UBU Vacuum Equipments Corp.,Ltd., established in 2009,is a high-tech enterprise who is professional in R&D, manufacture and marketing of the vacuum coating equipments. Our headquarters is located in the international port city - Qingdao, with convenient transportation and brilliant talents, but we also have offices and agents in Shenzhen, Shanghai and some foreign cities.
We supply 9 main coating equipments, including Multiple arc plasma vacuum coating machine, Magnetic sputtering vacuum coating machine, Multifunctional intermediate frequency vacuum coating machine, Evaporation vacuum coating machine, Automatic optical coating equipment, Vacuum roll coating machine, DLC vacuum coating machine, UV lacquer curing system and Continuous magnetic sputtering vacuum coating line. In addition, we also provide professional PVD coating services, supply related accessories and machine updating service, solve customer’s problems and make customers satisfied.
Now our company covers more than 20,000 sqms with more than one hundred employees and we have our own individual R&D team, production team, marketing team and after-sale service team. As a leader high-end manufacturing enterprise, our company successfully listed in 2014.
Adhering to the "Customer supreme and keep improving" concept ,following the "high quality, high efficiency, low energy consumption" development strategy, we have provided powerful vacuum service for many famous domestic and foreign companies. UBU will continue to cooperate with all the customers for the brilliant future.


Question 1: Are you manufacturer?
Answer: Yes, We are a CE, ISO,SGS certification manufacturer. Welcome to visit our factory anytime!
Question 2:Are engineer avaliable for after sales?
Answer: Yes. Engineer avaliable to oversea for trainning .
Question 3: What is price of the machine?
Answer: The machine is custom made.But we still have price range for reference based on the system.
If you have any drawing or any information on specification of the machine, please send to us for quote.
If you are totally new in this area, please tell us the max. dimension of your products, its application, and your desired capacity.
Our team will provide our professional suggestions and work out an appropriate design for your project.
Question 4: Does the machine operate and maintain easily?
Answer: Yes. We alway focus on intelligent operation and high quality deliver system to reduce maintenance.But we still have 1 year's warranty.The smart design makes it easily to control. named components make circuit protection system more safety.
Question 5: Do I have to pay for the pollution?
Answer: The machine is environment-friendly, there is no chemical liquid waste or harmful gas. This is a green technology.
We also provide the accessories of vacuum coating machine.

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