MEMS Mass Flow Sensor for 0~5 SLPM Range Flow Measure FS4003

Product Overview

Description

                   Mass Flow Sensor for 0~5 SLPM Range Flow Measure FS4003                

                                        Model Number: FS4003/MF4008                                           

 

1.General Description

 

FS4003 series mass flow sensors are designed for general purpose flow monitor and control
applications, and are made with Siargo's world leading proprietary MEMS mass flow sensors and
the smart electronic control system. The sensors directly measure mass flow in the designed
channel with a  low pressure loss. These sensors can readily  be applied for electronics flow
meters for anesthesia equipments, clean room air flow or nitrogen flush monitor and control,
environmental equipments such as air sampler, analytical instrumentation such as GC spectrometer.

FS4003 series has a flow channel diameter of 3 mm&8mm. This sensors have a very low pressure loss while it
can measure air flow up to 5 SLPM&0~50SLPM. Applications include leakage detection,  particle counter, and
analytical instrumentation.

2.Features and Applications
- Designed for 3 mm &8mm package
- Mass flow detectable from 0 ~ 5 SLPM &0~50SLPM 

- Exchangeable connectors for easy installation
- Digital and analog output provide easy access for various communications
- Compact design ready for multiple channel assembly
- Excellent for electronic meters in anesthesia equipment
- Fast response and low power consumption
- Low pressure loss

3.Mechanical Dimensions

 

 

4. Specifications (Model Number : MF4003&MF4008)

 

 

 

5. Product Selection

 

 

 

Kindly Please note:

 

We welcome our customers to develop application specific and cost effective mass flow sensors
and/or meters.  We have world tier-one high volume manufacture partners and will readily meet
these demands.  So Welcome any Customized  from you.