Высокоточный пьезоэлектрический сканер с платформой, дополнительный пьезоэлектрический сканер с серводатчиком и микроскопом

Models

S-Closed loop

K-Open loop

N12.X100S

N12.X100K

N12.Z100S

N12.Z100K

N12.XY100S

N12.XY100K

N12.XZ100S

N12.XZ100K

N12.XYZ100S

N12.XYZ100K

Units

Active axes

X

Z

X,Y

X,Z

X,Y,Z

Travel range(0~120V)

80

80

80/axis

80/axis

80/axis

μm±20%

Travel range(0~150V)

100

100

100/axis

100/axis

100/axis

μm±20%

Integrated sensor

SGS/-

SGS/-

SGS/-

SGS/-

SGS/-

Aperture

45×45

45×45

45×45

45×45

45×45

mm

Closed/open loop resolution

7/4

7/4

7/4

7/4

7/4

nm

Closed-loop linearity

0.1/-

0.1/-

0.1/-

0.1/-

0.15/-

%F.S

Repeatability

0.04/-

0.04/-

0.05/-

0.05/-

0.1/-

%F.S

Pitch/Yaw/Roll

<10

<10

<15

<15

<20

μrad

Push/pull force capacity

30/10

30/10

25/8

25/8

20/4

N

Stiffness

0.3

0.3

X0.25/Y0.3

X0.3/Z0.25

X0.3/Y0.25/Z0.2

N/μm±20%

Unloaded resonant frequency

230

200

X170/Y200

X200/Z150

X200/Y150/Z120

Hz±20%

Closed/open-loop unloaded Step time

10/0.8

10/0.8

15/0.8

15/0.8

30/0.8

ms±20%

Unloaded operating frequency

10% Travel

60

65

55

50

30

Hz±20%

100% Travel

8

8

7

6

4

Load capacity

0.7

0.7

0.7

0.7

0.5

kg

Electrical capacitance

1.8

1.8

1.8/axis

1.8/axis

1.8/axis

μF±20%

Material

Steel, Aluminum

Mass

240

240

290

290

350

g±5%