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Equivalent Brand: Fomblin
Brand | Typical | |||||||
RUI | 606 | 1406 | 1606 | 2506 | 1808 | 2509 | 40011 | 140013 |
Fomblin | 06/6 | 14/6 | 16/6 | 25/6 | 18/8 | 25/9 | 40/11 | 140/13 |
Property
RUI PFPE oils are perfluorinated polyether inert fluids for use as lubricants in vacuum pumps.RUI fluids are a mixture of fluorinated polymers obtained by a photochemical process that begins with hexafluoropropylene. These fluids have exceptional properties such as:
Low vapor pressure | Low toxicity |
Chemical inertness | High dielectric properties |
High thermal stability | Low surface tension |
Good lubricant properties | Good radiation stability |
No flash or fire point | Environmentally acceptable |
Good aqueous and non-aqueous solvent resistance | Excellent compatibility with metal, plastics and elastomers |
Features
Will not polymerize when exposed to oxygen,ionizing radiation or accelerated subatomic particles. The system stays free of varnish and deposit from fluid decomposition.
Non-flammable
Resistant to oxidation of explosion and hot fluid can be exposed repeatedly to air without harm to the fluid while running the pumps.
Inert to most reactive chemicals,the fluid can be used in direct contact with materials such as UF6,F2,PCl3,BF3,without harm to the fluid.
Technical Index
Typical Property | Unit | RUI(PFPE) M | ||||
606 | 1406 | 1606 | 2506 | |||
Average molecular weight | a.m.u. | 1800 | 2500 | 2700 | 3300 | |
Specific gravity(@20℃) | g/cm3 | 1.88 | 1.89 | 1.89 | 1.90 | |
Kinematic Viscosity | cSt | 64 | 148 | 168 | 276 | |
Vapor pressure | @25℃ | torr | 8×10-7 | 1×10-7 | 2×10-6 | 6×10-8 |
@100℃ | torr | 3×10-3 | 2×10-4 | 2×10-4 | 6×10-5 | |
Pour Point | ℃ | -50 | -45 | -45 | -35 | |
Heat of vaporization(@200℃) | cal/g | 11 | 8 | 8 | 7 | |
Surface tension | dyne/cm | 21 | 22 | 22 | 22 | |
Evaporation loss, (22hrs) | %by wt. | 2.8(120℃) | 2.6(149℃) | 3.9(149℃) | 0.6(149℃) | |
Ultimate total pressure | torr | 1.7×10-3 | 1.4×10-3 | 2.4×10-3 | 1.2×10-3 | |
Specific oil consumption | cm3/hr | 0.4 | 0.6 | 0.5 | 0.7 | |
Typical Property | Unit | RUI(PFPE) H | |||
1808 | 2509 | 40011 | 140013 | ||
Average molecular weight | a.m.u. | 2800 | 3400 | 4100 | 6600 |
Specific gravity(@20℃) | g/cm3 | 1.89 | 1.90 | 1.91 | 1.92 |
Kinematic Viscosity | cSt | 190 | 285 | 474 | 1508 |
Flash point | None | None | None | None | None |
Pour Point | ℃ | -42 | -35 | -32 | -23 |
Heat of vaporization(@200℃) | cal/g | 9 | 7 | 7 | 5 |
Surface tension(@20℃) | dyne/cm | 20 | 20 | 20 | 20 |
Refractive Index(n 20D) | / | 1.300 | 1.301 | 1.304 | 1.304 |
Specific heat capacity(@20℃) | cal/g·℃ | 0.24 | 0.24 | 0.24 | 0.24 |
Application
RUI PFPE oils are suggested for applications requiring the highest quality vacuum suchas in scanning electron transmission microscopes, mass spectrometers, particle accelerators, ion implantation, plasma and vapor deposition processes. In addition, it is suggested for pumps handing reactive gases such as UF6, F2, Oxygen, Ozone, and Tritium, as the fluid can be used in direct contact with those gases without reaction and fluiddegradation.
Typical | RUI(PFPE) M | RUI(PFPE) H | ||||||
606 | 1406 | 1606 | 2506 | 1808 | 2509 | 40011 | 140013 | |
Rotary pumps-sealing & lubricant fluid | √ | √ |
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Turbomolecular pumps-lubrication | √ |
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Roots pumps-lubrication |
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Diffusion pumps-working fluid |
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Packing and Storage
Available in 1kg plastic drums, 5kg plastic drums
Transport as non-hazardous chemicals, keeping away from rain and sunlight.



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