High temperature CVD Diamond 1700C Hydrogen Tube Furnace with Low Vacuum System
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- Supplier: Anhui Beq Equipment Technology Co. Ltd.
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Product Overview
Description
Product Description
High-temperature CVD Diamond 1700C Hydrogen Tube Furnace with Low Vacuum System
Vacuum flange
Product Description:
1.The BTF-1700C-4ZL-CVD is a CE sertified CVD system consists of 1700C high temperature single zone (optional)
tube furnace, a precision mass flow gas control station, a high vacuum station and other assembling parts. We adopted imported vacuum pump and valve with reliable quality.
The max. working temperature of this workstation is 1700°C. The ultimate vacuum rate goes to 10-1pa (with
our sealing assembly provided). The mass flow gas control station mixes several kinds of gas together and
input the mixed gas into a fused quartz tube inside the furnace.
2.The technology of control circuit is vague PID automatic control with high precision temperature and operate easily.
3.The CVD growing-system can be used in CVD art,like carborundum substrate coating,conductivity test of ceramic film,controlled growth of Zno nanometer structure and MLCC atmosphere sintering experiment etc.
Parameter:
1700C Single zone tube furnace BTF-1700C: | |
| Power | 5.2KW |
| Voltage | AC 208-240V 50/60HZ |
| Working temperature | Max. Temperature: 17000 °C (1 hour) Working temperature:≤1600℃
|
| Suggested. Heating Rate | below 1400℃≤10℃/min;From 1400℃ to 1600℃≤5℃/min |
| Zone length | Heating Zone Length:300mm Constant Temperature Zone:150mm |
| Temperat controller |
|
| Heating element | MOSi2 rods |
| Processing tube | O.D80*1000mm(optional)
|
Standard accessories | quartz tube 1 pcs,stainless steel sealing flange 1set,silicon sealing ring 2set,high temperature glove1pair,quartz block 2sets. |
| Adopted accessories | quartz crucible 1pcs,quartz hook 1pcs,manual baffle valve 1pcs,corrugated pipe 1 pcs,vacuum gauge 1set,resistance monometer 1pcs and crucible hook 1pcs |
| Four channel Mass Gas Control GMF-4Z: | |
| Standard range ability | 100 ,200,200,500SCCM(standard gas is N2,range ability can be choosed) |
| Working environment | 5-45℃ |
| Pressure differential | 0.1~0.5 MPa |
| Max. pressure | 3MPa |
| Mixing tank | φ80*140mm |
| Accuracy | ±1.5% FS |
Vacuum pump:(optional) | |
| Product model | VAU-02 |
| Relative air humidity | ≤85% |
| Vacuum lever | 5*10-1pa |
| Pumping speed | 10m³/h |
| Pressure scope |
1.01325X105~1.33X10-2Pa |
| Power | 1KW |
| Voltage | 220V±10% 50~60HZ |
| Oil volume | 0.7-1.1Liter |
| Inlet &Outlet port | KF25 |
| Noisy | 50db |
| Size | 600×600×600mm |
| Connection | Use bellow pipe,manual baffle valve and clamp to connect |
Digital Vacuum Gauge: Gauge is installed on the vacuum flange (left side) of tube furnace and provides a wide measure range Accurate pressure reading with any mixed gases
| |
| Vacuum gauge | ZJ-52T resistance gauge |
| Mearsurement range | 1×10 5 ~1×10 -1 Pa |
| Control range | 5×10 3 ~5×10-1 Pa |
| Control way | Output through relay contact,load capacity is AC220V/3A(or DC28V/3A) noninductive load |
| Power | 20W |
| Voltage | 90-260V/50Hz or 220V ± 10% 50Hz |
Vacuum pump
Packaging & Shipping
Packaging&Shipping
Company Information
Anhui BEQ Equipment&Technology is professional in professional in preparation equipment developing and producing for new material and new energy.BEQ ia awarded as little giant enterprise of science and technology in Hefei and model enetrprise of new energy industry.The registered capacity is ten milions and the vested amount is three billon.With years developed,BEQ have owned many experts and have a key Lab of 400 square meters.Parts are opened to teachers.
We are reaching in kinds of material industry,such as Graphene,CNT,High temperature phosphors,OLED,Semi-conductive material,magainism material,file preparation,Sing crystal of metal or ceramic,Cell and fuel and so on.We peoduce the OLED equipment(output can be 5-50kg),Silver ssintering equipment,CSS system.RTP furnace,graphene growing furnace,PECVD &CVD system,furnace of high temperature and high pressure,Vacuum Sintering and so on.
We supply equipment the output can be from Lab to pilot scale test and industry producing,Welcome to negotiate.
We supply mal-function Lab.You can try by yourself or post to test for free in Lab.
We supply the complete services,We will arrange for you!
We supply the maintance serve for our products to settle the problem of the after-sale.
WECLOME
Team Activity
Campany Activity
Exhibition
Certificate
Exhibition
2016 China International Symposium on Energy and Materials Chemistry
2015 4th Internation Advanced New Material Conference(WCAM)
4th Anunual China International OLEDs Summit in 2015
2014 China Material Conference
2013 Internation Advanced Material Industry Technology&Laboratory Equipment Exhibition (CIAMITE)
2012 Internation Advanced Material Industry Technology&Laboratory Equipment Exhibition (CIAMITE)
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