1.This furnace is split tube furnace that configurates to meet CE certificate standard. 2.The furnace can adopt aO.D60,80 or 100mm quartz tube and a pair of stainless steel vacuum sealing flanges with
needle valves &gauge allow heating samples under vacuum or gas flow conditions. 3.The temperatureof this tube furnace iscontrolled by a high precision digital controller which provides30 programmable
segments with +/- 1°C accuracy. The max. working temperature is1400°C. It is widly used in the semiconductor,nanometer material,carbon fibre and graphene .etc new technology.
Parameter:
Power
6KW
Voltage
AC 220V 50/60HZ
Working temperature
Max. Temperature: 1400 °C (1 hour)
Continuous working temperature: 1300 °C
Suggested. Heating Rate:≤10℃/min
Zone length
Heating Zone Length:400mm
Constant Temperature Zone: 200mm
Temperature controller
PID automatic control and auto-tune function.
30 programmable segments for precise thermal processing.
Built-in protection for over-heated and broken thermocouple.
Temperature Accuracy: +/- 1 °C.
S-type thermocouple.
Heating element
SiC rods
Processing tube
O.D60/80/100*1000mm(optional)
Two fibrous ceramic tube blocks are included for blocking heat radiation generated from tube center. (Ceramic blocks must be fully inserted into the furnace chamber before heating).
Quartz blocks (optional) are ideal for cleaner processing environment and higher vacuum efficiency
.
Standard accessories
corundum tube 1 pcs,stainless steel sealing flange 1set,silicon sealing ring 2set,high temperature glove1pair,quartz block 2sets.
Vacuum lever(optional)
1.0×10-3 Pa(mechanical pump+molecular pump)
Adopted accessories
corundum crucible,removable furnace frame,clamp,manual baffle valve ,corrugated pipe ,vacuum gauge ,resistance monometer ,mixed gas system
