100 ,200,200,500SCCM(standard gas is N2,range ability can be choosed)
temperature accuracy
+/-1C
vacuum lever
5x10-1Pa
oil capacity
0.7-1.1 liter
Name
CVD System 1200C Vacuum Tube Furnace
Product Keywords
CVD furnace
Product Description
CVD System 1200C Vacuum Tube Furnace with 4 Channels Mass Flowmeter Gas Cotrol and Lower Vacuum Unit
Product Description:
1.The BTF-1200C-4ZL-CVD series furnace workstation consists of BTF-1200C series single zone (optional)
tube furnace, a precision mass flow gas control station, a low vacuum station and other assembling parts. We adopted imported vacuum pump and valve with reliable quality. The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 10-1pa (with our sealing assembly provided). The mass flow gas control station mixes several kinds of gas together and input the mixed gas into a fused quartz tube inside the furnace.
2.The technology of control circuit is vague PID automatic control with high precision temperature and operate easily.
3.The CVD growing-system can be used in CVD art,like carborundum substrate coating,conductivity test of ceramic film,controlled growth of Zno nanometer structure and MLCC atmosphere sintering experiment etc.
Parameter:
1200℃ single zone tube furnace BTF-1200C:
Power
3KW
Voltage
AC 208-240V 50/60HZ
Working temperature
Max. Temperature: 1200 °C (1 hour)
Continuous working temperature: 1100 °C
Suggested. Heating Rate:≤15°C /min
Zone length
Heating Zone Length:400mm Constant Temperature Zone: 200mm
Temperat controller
PID automatic control and auto-tune function.
30 programmable segments for precise thermal processing.
Built-in protection for over-heated and broken thermocouple.
Temperature Accuracy: +/- 1 °C.
K type thermocouple.
Heating element
Fe-Cr-Al Alloy doped by Mo
Processing tube
O.D60*1000mm(optional)
Two fibrous ceramic tube blocks are included for blocking heat radiation generated from tube center. (Ceramic blocks must be fully inserted into the furnace chamber before heating).
Quartz blocks (optional) are ideal for cleaner processing environment and higher vacuum efficiency .
Standard accessories
quartz tube 1 pcs,stainless steel sealing flange 1set,silicon sealing ring 2set,high temperature glove1pair,quartz block 2sets.
