Nanopositioning systems piezo actuator price phase shifter xyz positioning stage/xy xyz table price xyz stages

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Product Overview

Description


nanopositioning systems piezo actuator price phase shifter xyz positioning stage/xy xyz table price xyz stages


 



Company Information


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Specification


we can customize any models products according to your sizes or quality requirements
















































































Version



NS-XY200Z15-01



Unit



Axis of Motion



X/Y



Z



 



Sensor Type



Capacitance



Capacitance



 



Closed-loop Travel



200



15



μm



Closed-loop Resolution



0.8



0.1



nm



Linearity



0.02



0.04



%



Unloaded Resonant Frequency



400



900



Hz



Drive Voltage



-30~+150



-30~+150



V



Cable Length



2



2



m



Connector Type



D-sub15



D-sub15



 



Material of Stage



Aluminium alloy



 



Maximum Load



5



kg



Volume



140 x 140 x 30.2



mm






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Certificate&Exbit


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