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nanopositioning systems piezo actuator price phase shifter xyz positioning stage/xy xyz table price xyz stages
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Version | NS-XY200Z15-01 | Unit | |
Axis of Motion | X/Y | Z |
|
Sensor Type | Capacitance | Capacitance |
|
Closed-loop Travel | 200 | 15 | μm |
Closed-loop Resolution | 0.8 | 0.1 | nm |
Linearity | 0.02 | 0.04 | % |
Unloaded Resonant Frequency | 400 | 900 | Hz |
Drive Voltage | -30~+150 | -30~+150 | V |
Cable Length | 2 | 2 | m |
Connector Type | D-sub15 | D-sub15 |
|
Material of Stage | Aluminium alloy |
| |
Maximum Load | 5 | kg | |
Volume | 140 x 140 x 30.2 | mm | |
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