1200 Degree Electrical Plasma Enhanced Chemical Vapor Deposition PECVD Vacuum Tube Furnace With Proton Mixing Control System
Electric Vacuum Tube furnace Application:
Tube furnace mainly used in chemical analysis, physical decomposition and synthesis, super hard
materials (such as ceramic), Rare and precious metal smelting and purification, metal heat treatment of sintering process research and other scientific experiments. Universities and colleges, scientific research institutes, medical and health, petroleum chemical industry, mining enterprise, quality and technology supervision agencies, and other units laboratory, laboratory are the use of such equipment.
Product Description
Furnace Structure & Chamber:
High purity fibrous alumina insulation for maximum energy saving 60-80% less power consumption than old style.
Heavy duty double layer structure with cooling fan to keep furnace exteriors safe to touch.
Vacuum PECVD tube furnace details specification :
Rated Voltage & Power:
AC 220V 50/60Hz, 4kw
Inner Chamber Size:
Quartz tube OD60mmx heating zone 400L ,
Tube OD 40-200mm or bigger;
Single/ 2/3/5 or more heating zone optional.
Each zone: 150/200/300/400/600mm optional;
Max. Temperature:
1200.C for short time ;
Continuous Working Temperature:
1100.C Max.
Max. Heating Rate:
0-30.C /min, suggest to be 10.C/Min;
Temperature Controller:
PID automatic control and auto-tune function,
30 programmable segments for precise process.
Each zone with one controller
Temperature Accuracy:
+/- 1 .C.
Heating Element:
1200.C grade Fe-Cr-Al Alloy doped by Mo.
Thermocouple:
K type
Plasma RF power supply:
Output power: 50-500W maximum adjustable ±1% RF frequency: 13.56MHz, stability ±0.005% Input power: 1KW AC 220V
Crucible tongs 1pc, high temperature gloves 1 pair , one user manual.
Optional parts:
PLC touch screen controller, paperless recorder,Remote communication control system, 2-3 gas channels mixing system desktop.
Vacuum PECVD tube furnace Application Notes:
(1)Furnace tube pressure can not be higher than 0.02MPa (2)As the internal pressure of the cylinder is high, so the gas into the furnace tube, the cylinder must be installed on the valve, the proposed purchase of the company pressure valve, the company valve range of 0.01MPa-0.1MPa, Will be more accurate and safe (3)When the furnace temperature is higher than 1000 ℃, the furnace tube can not be in a vacuum state, the furnace pressure and atmospheric pressure equivalent to maintain the atmospheric pressure (4)The gas flow into the furnace tube should be less than 200 SCCM to avoid the impact of cold airflow on the heated quartz tube.
Warranty: One year limited warranty with lifetime support, excluding heating element,cooling fans,thermocouple and ceramic tube damaged by user.
Attention: Any damages caused by the use of corrosive and acidic gases, and any damage from wrong operate and use are not under the coverage of One Year Limited Warranty.
Vacuum PECVD tube furnace Pictures reference :
Packaging & Shipping
Shipping way : By Courier / By sea / By Air /By Train Optional, depend on clients' demad of time and cost.
Shipping terms: Support EXW /FOB/C&F /CIF/ CPT/CIP /DDU /DDP terms...
Even for some countires with high taxes and some Remote areas, we can ship goods to your Door address and including taxes.
Related Products
You May need other Heat treatment furnace in the following:
1700.C sintering muffle furnace
1200.C argon atmosphere furnace
1400.C Vacuum Tube furnace
1700.C bottom loading furnace
High Vacuum Sintering Furnace
Industrial Trolley furnace
Buyer Feedback
Company Information
Nanyang Dadi Electric Equipment Co., Ltd is a professional Heat treatment furnace manufacturer with more than 10 years experiences.
now!
