Nanopositioner piezoelectric mirror laser scanning microscope nano cylinder linear actuator nano linear nano positioning stage

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Product Overview

Description


White laser scanning platform xy xyz semiconductor probe table nano cylinder linear actuator nano linear nano-positioning stage

 

Company Information

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Specification

we can customize any models products according to your sizes or quality requirements

Version

NS-XY200Z15-01

Unit

Axis of Motion

X/Y

Z

 

Sensor Type

Capacitance

Capacitance

 

Closed-loop Travel

200

15

μm

Closed-loop Resolution

0.8

0.1

nm

Linearity

0.02

0.04

%

Unloaded Resonant Frequency

400

900

Hz

Drive Voltage

-30~+150

-30~+150

V

Cable Length

2

2

m

Connector Type

D-sub15

D-sub15

 

Material of Stage

Aluminium alloy

 

Maximum Load

5

kg

Volume

140 x 140 x 30.2

mm

Product Description

Nanometer displacement system has come into more and more extensive use, such as AFM (atomic force microscope), precision optical equipment, semiconductor device, and various high-tech industries. Nanometer displacement system is capable of generating and measuring displacement superior to nanometer (nm) and the entire system consists of three parts, i.e. nanometer displacement platform, controller and control software.

 

As a mechanical device, nanometer positioning platform is equipped with one or several piezoelectric ceramics internally which generate monaxial or multiaxial motion. The nanometer positioning platform designed and manufactured by us applies flexible hinge which connects the motion unit with the fixed base. The nanometer positioning platform is equipped with a built-in high-precision sensor. When under closed-loop control, our sensor technology may bring about resolution ratio in nanometers and sub-nanometers when the linearity is guaranteed.

 

The controller supplies power to the nanometer positioning platform. When under closed-loop control, the controller in the nanometer positioning platform provides displacement data for the controller. Besides, the controller processes the displacement data and corrects the output voltage signals periodically to make sure the displacement data and the instruction data are consistent.

 

Simple and convenient software

The nanometer displacement system usually serves as a component for large devices. Therefore, the proper application of nanometer displacement system with other hardware is of great importance. There are multiple modes of communication between our controller and the external environment. The one most commonly used is to control the displacement of the nanometer displacement platform via BNC signals (-10V~10V). It is also acceptable to accomplish the communication with controller by means of USB port and digital IO. The software inside controller achieves the PID algorithm-based closed-loop control for notching filter and integrates the waveform generator with sine wave, square wave and triangular wave internally. In case of special requirements from customers, we may offer customized software and controller firmware.

 

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