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Ultra High Purity Single Stage VCR Connection Pressure Regulator for semiconductor

Ultra High Purity Single Stage VCR Connection Pressure Regulator for semiconductor

Price:$235.00 - $240.00

Price in USD:Details

Quantity:

Product Description

1. SS316L construction

2. 10μin. surface finish(25μin.optional)

3.Vacuum to 3500 pisg(241 bar)inlet

4. 1to 150psig (0.07 to 10bar)outlet

5. Cleaned,assembled and packaged for high purity semiconductor applications

6.Flow rates

- Standard to 30 slpm

-HF option to 120slpm

7.Regulator of choice for point of use applications

Operating Parameters

Other Parameters

\t Inlet/outlet connectors	\t 1/4 or 3/8 inch face seal or tube weld
\t Flow coefficient(Cv)	\t 0.09(0.15 HF option)
\t Internal volume	\t 0.49 in3 (8 cm3)
\t Operating Temperature	\t -40℉ to 160℉
\t Surface finish	\t 10 μin.(0.25μm) Ra avg.standard 25 μin.(0.62 μm)Ra avg.optional
\t Inboard leakage	\t 2 x 10-10 sccs
\t Outboard leakage	\t 2 x 10-9 sccs He
\t Leakage across seat	\t 4 x 10-8 sccs He
\t Installation	\t surface or panel(optional)
\t Supply Pressure effect HF	\t 0.25 psig per 100 psig source pressure change HF 0.75 pisg per 100 psig source pressure change

Products Show

Order information

\t Sample Order Number	\t UR 100 -SS- Ra- 2BW- F4 F4-0-HF
\t UR 100 - SERIES	\t UR 1001 =1-10psig(0.07 to 0.7bar) UR 102=1-30 psig(0.07 to 2 bar) UR 106= 2-60 pisg(0.14 to 4bar) UR 1001= 2-100 psig(0.14 to 7bar) UR 1005=5-150 psig(0.34 to 10bar)
\t SS-MATERIAL	\t SS=Stainless steel(SS) H= SS/Ni-Cr-Mo ally poppet anddiaphragm
\t Ra- SURFACE FINISH OPTION	\t RA=25 μin.Ra avg
\t 2BW-PORTS	\t 2BW =2ports butt weld 3BW=3ports butt weld 4BW=4ports butt weld
\t F4 F4- Connections inlet/outlet	\t F4= 1/4 inch face seal female M4=1/4 inch face seal male F6=3/8 inch face seal female M6=3/8 inch face seal male Tube weld stub available
\t 0 -DELIVERY	\t 0=no gauge 1= 30-0-30psi/bar 2=30-0-60psi/bar 3=30-0-100psi/bar 4=30-0-160psi/bar *Standard gauge port is 1/4 inch face seal male (1/4 inch face seal female are available)
\t HF-OPTIONS	\t P= Panel installation VS=Vespl seat HF=High flow Panel hole 1.569 diameter