Ultra High Purity Single Stage VCR Connection Pressure Regulator for semiconductor

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Price:$235.00 - $240.00
Price in USD:Details

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Product Overview

Description


Product Description

Features

1. SS316L construction

2. 10μin. surface finish(25μin.optional)

3.Vacuum to 3500 pisg(241 bar)inlet

4. 1to 150psig (0.07 to 10bar)outlet

5. Cleaned,assembled and packaged for high purity semiconductor applications

6.Flow rates 

    - Standard to 30 slpm

    -HF option to 120slpm

7.Regulator of choice for point of use applications

Operating Parameters
\t
Soure pressure
\t
Vacuum to 3,500 psig(241bar)
\t
\t
for UR101   300psig(21bar)
\t
Delivery pressure
\t
UR101
\t
1 to 10 psig (0.07 to 0.7bar)
\t
\t
UR 102
\t
1 to 30 psig(0.07 to 2bar)
\t
\t
UR 106
\t
2 to 60 psig (0.14 to 4bar)
\t
\t
UR 1001
\t
2 to 100psig(0.14 to 7 bar)
\t
\t
UR 1005
\t
5 to 150psig(0.34 to 10bar)
\t
Proof pressure
\t
5,000psig(345bar)
\t
Burst pressure
\t
10,000(690bar)

Other Parameters

\t
Inlet/outlet connectors
\t
1/4 or 3/8 inch face seal or tube weld
\t
Flow coefficient(Cv)
\t
0.09(0.15 HF option)
\t
Internal volume
\t
0.49 in3 (8 cm3)
\t
Operating Temperature
\t
-40℉ to 160℉ 
\t
Surface finish
\t
10 μin.(0.25μm) Ra avg.standard
25 μin.(0.62 μm)Ra avg.optional
\t
Inboard leakage
\t
2 x 10-10 sccs
\t
Outboard leakage
\t
2 x 10-9 sccs He
\t
Leakage across seat
\t
4 x 10-8 sccs He
\t
Installation
\t
surface or panel(optional)
\t
Supply Pressure effect
                                        HF
\t
0.25 psig per 100 psig source pressure change
HF 0.75 pisg per 100 psig source pressure change
Products Show

Order information

\t
Sample Order Number
\t
UR 100 -SS- Ra- 2BW- F4 F4-0-HF
\t
UR 100 -  SERIES
\t
UR 1001 =1-10psig(0.07 to 0.7bar)
UR 102=1-30 psig(0.07 to 2 bar)
UR 106= 2-60 pisg(0.14 to 4bar)
UR 1001= 2-100 psig(0.14 to 7bar)
UR 1005=5-150 psig(0.34 to 10bar)
\t
SS-MATERIAL
\t
SS=Stainless steel(SS)
H= SS/Ni-Cr-Mo ally poppet anddiaphragm
\t
Ra- SURFACE FINISH OPTION
\t
RA=25 μin.Ra avg
\t
2BW-PORTS
\t
2BW =2ports butt weld
3BW=3ports butt weld
4BW=4ports butt weld
\t
F4 F4- Connections inlet/outlet
\t
F4= 1/4 inch face seal female
M4=1/4 inch face seal male
F6=3/8 inch face seal female
M6=3/8 inch face seal male
Tube weld stub available
\t
0 -DELIVERY
\t
0=no gauge
1= 30-0-30psi/bar
2=30-0-60psi/bar
3=30-0-100psi/bar
4=30-0-160psi/bar
*Standard gauge port is 1/4 inch face seal male
(1/4 inch face seal female are available)
\t
HF-OPTIONS
\t
P= Panel installation**
VS=Vespl seat
HF=High flow
**Panel hole 1.569 diameter

Our Company

Factory

Our Factory

Workshop

Our Workshop

Warehouse

Our advanced stock management system. 

Team

Our team will serve you at 24*7 days.

 NAI-LOK 1000 class clean room

 

Certifications
Our Service
Strict test standards

Strictly according to International standards.

100% factory test

 1. leakage test
 2. pressure test

 

 Customized products

We have a good research and development team with rich experience.

 

Packing & Delivery

Packing Details  : Wooden Case, Carton Box

Delivery Details : 1-2 days after payment for small order

1. Special logistics packaging
2. Sea or Air
3. Global Express
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