Inline Magnetron sputtering coating system for CdTe Thin film photovoltaics

Product Overview

Description

HCVAC Inline coating system based on our  proprietary large-area coating technology. As the coater is very iwde and can therefore process many substrates at the same time,it is especially suited for high productivity applications at very low costs, it is suited for large area glass substrates. HCVAC already delivered coating system to many glass manufacturers.

HIGHEST ECONMOY OF SCALE:

Due to it's large width.the productivity of the tool is exceptionally high while the process utilization is brought to a maximum. Based in China, HCVAC can offer the best cost of ownership by providing applicable econnomy of scale.

Process chamber:

The process chamber can be equipped with give or more different process stations in a sputter down arrangement. it enables simultaneous processing of different material compositions from metallic and ceramic targets.

Technical data

Substrate:GLASS   

SIZE:2000MM*2400MM

Application:LCD Panel,CIGS Thin-film photovoltaics,CdTe thin-film photovoltaics,Organic Photovoltaics

Target:ITO,SIO,TIO,ZNO,CRO,AZO,GZO,IGZO,METAL

Power source:DC,PULSED DC or MF

Magntron type: Planar,single or dual rotatable

Type of transport: INLINE

Orientation of substrate during deposition: horizontal,LEL,SEL   

System control: PLC 

System dimensions: Min 20m*16.5m*3.5m

1. Large size chamber and large size glass applicable

2.High efficient cathode manufacturing technology 

3. Partical control technology and film uniformity securing technology

We can do nonstandard size and application according to customer's requirements

Breakthrough Innovation and Technology

1. Coating based on the world's most popular rotating cathode, sputtering rate greatly increased, while usage of target has increased by 200% or more. Effectively reducing the production cost.

2. Using the most advanced infrared heating system in the world, the system can achieve short heating time,fast heating up, energy consumption is less than 1/3 of conventional heating pipe. The ordinary heat pipe vacuum chamber evenly heated to 400 °C need 2-3 hours at least with constantly heated.However, because of the special circumstances of the vacuum chamber and infrared heating tube targeted design, you can complete vacuum chamber preheating process within 1-1.5 hours.

The coating experts of your own company:Full set solution for the coating production

Company Information

Company Information

 

 

Guangdong Huicheng Vacuum Technology Co., Ltd. is a high-tech enterprise specialized in the R& D,
production, and marketing kinds  of Vacuum coating machine and related products. We start in this field in 2006, and already install machines more than 40 countries.

Factory workshop:

 

Certifications

 

 

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