Custom voice coil actuator for Semiconductor manufacturing equipment

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Product Overview

Description


custom voice coil actuator:


 


 


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Product Description


 

































The main application of a voice coil motor:



1.Semiconductor industry:Wiring, cutting, drilling, transportation systems, welding,robotics.



2.Valve operation in the field:Type metering valves, pressure test systems, pneumatic valve chemistry 


injection system.



3.Micro Machine industry:Feed systems, micro drilling, precision stamping.



4.Vibration System:Shaking table, vibration platform.



5.Medical field:Micro-injection system, respiratory equipment, testing equipment.



6.Aviation Technology:Flight control system, pilot feedback system.



7.Commercial use field:Computer cooling pump miniature camera auto focus system.



8.Automation industry:Laser equipment,dispenser, test equipment, textile machinery.



 


The Rotary Actuators have taken the technology of the rectangular linear actuator and bent therm to provide a high resolution


limited angle positioning system.Typical stroke angles exceed 100 degrees and torques to 50 Nm.


The Rotary Actuators are typically utilized as mirror position Actuators for laser technologies,rotary valve and damping Actuators


rotary positioning systems and flight control Actuators, Rotary Actuators markets include semiconductor,automotive,


industrial and aerospace industries.


 






















































































































VARS Series of Swing type voice coil motor
ModelPeak torque(N-M)Continuous torque25℃(N-M)Maximum travel(mm)Voltage(V)Back EMF constant(V/m/S)Coil weight(g)Width*height (mm)Length(mm)
VARS0008-026-00A0.0800.04526.06.40.04511.739.8*26.135.00
VARS0017-090-00A0.1700.11090.011.10.1118.044*3970.00
VARS0022-032-00A0.2200.12032.015.50.1621.551.5*2660.00
VARS0042-040-00A0.4200.38040.03.50.1238.053.6*30.382.00
VARS0077-020-00A0.7700.63020.06.70.2466.050*3075.00
VARS0084-030-00A0.8400.60030.06.30.254.248.9*30.675.00
VARS0120-020-00A1.2001.20020.08.40.6765.073.5*3280.00
VARS0706-014-00A7.1002.10014.052.41.03220.065*54.5115.00
VARS4520-030-00A45.20019.00030.071.54.31300.0240*78240.00


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0.1896 s.