Magnetron Sputtering Coater for Thin Cu Film on Polymer
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- Supplier: Zhengzhou Tainuo Film Materials Co. Ltd.
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Product Overview
Description
Magnetron Sputtering Coater for Thin Cu Film on Polymer
Product Description
CY-MSP300S-DC is a compact magnetron sputtering system with 2" target sources, one DC source for coating metallic film. This coating system is designed for coating both single or multiple film layers for a wide range of materials, such as alloy, ferroelectric, semiconductor, ceramic, dielectric, optical, PTFE, etc..
Technical Parameter
Input Power | Single phase 220 VAC, 50 / 60 Hz Total power: 3KW (including vacuum pump and water chiller) |
DC Power Supply | One 500W DC power supply is included for metallic target sputtering. |
Sample stage | Dimension: φ185mm Heating temperature: Max 500℃ Temperature control accuracy: ±1℃ Rotate speed: 1-20rpm adjustable |
Magnetron Sputtering Gun | Dimension: 2 inches (can be customized)
Water chiller: Circulating water chiller with flow rate of 10L/min
Cooling mode: Water cooling |
Vacuum chamber | Chamber size: φ300mm×300mm Glass window: φ100mm
Chamber material: Stainless steel Opening mode: Top cover open |
Mass flowmeter | 2 channels; measuring range 100sccm (can be customized according to customer needs) |
Vacuum system | TYFB-600 molecular pump: pumping rate 600 L/s
VRD-4 Two-stage rotary vane vacuum pump: pumping rate 4 L/s Ultimate Vacuum: 3x10-6 Pa Vacuum gauge: compound vacuum gauge Power supply: AC220V 50/60Hz |
Film Thickness Monitoring System | Resolution: +/- 0.03Hz (5-6MHz), 0.0136Ã Accuracy: +-/05% thickness Measurement speed: 100mS-1S adjustable Measurement range: 500 000Ã Standard sensor crystal: 6MHz Analog output: 8 bit resolution, PWM Monitor connects the computer to display or connect the display by software |
Overall size | 600mm*650mm*1280mm |
Total Weight | 300kg |
Detailed Pictures
Packaging & Shipping
Plastic paper inside, polyfoam filled, wooden box outside or as your requirement.
Shipping and transportation as customer request. Generally, our mode of transport are by sea, by air or rail transport.
Our Services
1. Reply your inquiry in 24 working hours.
2. Experienced staffs answer all your questions in fluent English.
3. Customized design is available.
4. Exclusive and unique solution can be provided to our customer by our well-trained and professional engineers and staff.
5. Professional factory : We are manufacturer, specializing in laboratory equipment.
Company Information
Zhengzhou TAINUO Film Materials Co., Ltd. is mainly engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches. Our main products include: PVD magnetron sputtering coater, plasma sputtering coater, evaporating coater, spin coater, dip coater, tape casting coater, plasma cleaner, metallographic cutter, lapping and polishing machine, dental furnace, CVD tube furnace system, electrospinning system and so on.
Partial Company Products
Contact Information
Please do not hesitate to make an inquiry to us !
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