Factory direct sale high purity Boron Trichloride Gas bcl3 with 40L 47L cylinders
BCL3 is used for the manufacturing of semiconductor devices, flat panels, photovoltaic panels and MEMS.
Product Name :
Boron trichloride
Purity:
99.9-99.999%
CAS No.:
10294-34-5
EINECS No.:
233-658-4
MF:
BCl3
Molar mass.:
10294-34-5.mol
UN No.:
3390
Hazard Class :
2.3
Appearance:
colorless
Odor:
Strong odorous
Inspection item
unit
Purity
BCL3
%
99.9
99.999
CL2
ppmw
≤100
-
Phosgene
ppmw
≤100
-
O2
ppmv
-
≤1.0
N2
ppmv
-
≤1.0
CO2
ppmv
-
≤1.0
CO
ppmv
-
≤1.0
Application
Usage
Typical Application
In the semiconductor process
1. In semiconductor fabrication, boron trichloride is used for P-type diffusion on silicon wafers.
2. Ion Implantation.
3. Metal plasma etching.
4. In a variety of chemical reactions.
Packing & Delivery
Cylinder Size
DOT/48.8 L
DOT/47L
40L
10L
4L
Valve
CGA 660/DISS 634/W22-14L
FAQ
Why Choose Us
Our Company
Air Gas Electronic Materials Enterprise Co., Ltd is a manufacturer. Our head office was located in Taiwan. With over 20 years experience in the supply of industrial and specialty gases, materials ,Gas supply system and Gas engineering to the semiconductor, LED, DRAM, TFT-LCD market, we can provide you with the necessary materials to launch your products to the cutting edge of the industry.
Our products (BCL3, N2O, C2F6, C4F8, C4F6, CHF3, SiH4, SF6, CF4, Neon, GeH4 and etc. ) satisfy the electronics industry's exacting standards for safety, quality, control, reliability and performance, and we offer a value-add portfolio of ultra-high-purity process gases, precursors and sputtering targets to meet your needs. And with state-of-the-art facilities in China mainland, Taiwan, India, and UK, we have the means to maintain a reliable product supply for our customers across the globe.