Rapid Thermal Processing Two Zones CSS Furnace with Rotating Wafer Holder Max 800C

Rapid Thermal Processing Two Zones CSS Furnace with Rotating Wafer Holder Max 800C 

Features

OTF-1200X-RTP-II-5-R is an advanced rapid thermal processing furnace with 11" I.D. quartz chamber and 5“x5" rotating sample holder. It is designed for CSS  film coating up to 5" circular or square wafer samples at working temperature of 800°C Max. The furnace is heated by two group of halogen heaters (Top and Bottom) separately with max. 10ºC/s heating rate. The top sample holder is rotatable to achieve high uniformity coating. It is an excellent tool to research new generation thin film for solar cells, such as CdTe, Sulfide, and Perovskite solar cell. 

Specifications

Furnace structure	Furnace, two temperature controllers, two-channel gas flowmeters are integrated into a mobile aluminum alloy frame. The chamber is made of high purity fused quartz tube with dimesion of 11" OD/10.8" ID x 9" H. The vacuum flanges are made of Stainless Steel 316 and lifting by electric motor. Two 5"x5"  IR heating plates and the spacing are adjustable . Top sample holder is rotatable at the speed 0 - 7 RPM.
Vacuum Flanges	Top Flange with one KFD-25 vacuum port and one gas outlet (1/4" pipe required) can slide up or down manually to load and unload substrate and evaporated material easily. Bottom flange has one KFD-25 vacuum port with one gas inlet (1/4" pipe required) with needle valves. The flange is sealed by double silicone o-rings and can achieve max. the vacuum pressure of 10E-2 Torr by a quality mechanical pump and 10E-5 Torr by a molecular pump (vacuum pump is not included, please order separately). One digital vacuum gauge is installed on the top flange.   Precision anti-corrosion digital vacuum gauge is in standard package(Since 2016.03.24).
Heater and Sample Holder	Two independently controlled heaters with manually adjustable gap from 2 - 30 mm.  20 pcs Halogen lamps are used as the heating element for rapid thermal processing. Heaters are made of stainless steel with water cold jacket to reduce heat radiation and are capable of fast cooling. 5" Dia. the circular wafer holder is built into the top heater for holding the substrate. One set of high thermal-conductive AlN plates (5" Dia. x 0.5mm Thick) are included (place on the back of the substrate to make it heat uniformly). A 58L/min circulating water chiller is included for saving water source ( click the picture below to see detailed specs). Top sample holder is rotatable at adjustable speed  0 - 7 RPM
Temperature Controller	Two precision digital temperature controllers with 30 segments programmable offer independent controlling of top and bottom heaters. Each controller has a PID autotune function to protect heaters from overshooting and an alarm function to prevent overheating from damaging the thermal couples. PC communication interface & software are installed for (click the picture below for details) recording temperature profile shown as below.
Working Temperature	Maximum temperature for each heater: ≤ 800ºC. Maximum temperature difference between two heaters: ≤ 300ºC depends on the spacing between two heaters: Spacing 30mm       Max. temp difference:  315ºC @ heating bottom only
Heating & Cooling Rate	Heating: < 8ºC/s ( heating single heater only ) Cooling: < 10ºC/s (600 - 100ºC) Max.
Thermal Couple	Two K-type thermal couples are installed on top and bottom heaters separately.
Working Voltage	208 - 240VAC, single phase, 50A air breaker
Power Requirement	10 KW  total
Dimensions	( click pic to see dimension )
Shipping Weight & Dimension	Two pallets: 525 lbs   and 48" x 40" x 87" and 165 lbs with 39x31x29" dimension
Optional	One vacuum pump is required. Please order separately by clicking the first picture from the left below. Vacuum level can reach ≤ 10E-2 torr by mechanical pump.  If using corrosive gas, please use a cold trap or anti-corrosive dry pump is shown in the picture 2-3 at extra cost. You may choose digital MFC gas delivery system by clicking the first picture from the right below.
Warranty	One year limited with lifetime support ( Consumable parts such as quartz tube and heating lamps are not covered by the warranty).
Application Notes & Warnings	The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa. Vacuum pressures may only be safely used up to 1000°C. The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube. Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.  The foot-stand of this furnace is designed for short distance hauling on the even surface (without pits or bumps) only.

Product  Images