New product Sliding 2D molybdenum disulfide(MoSi2) cvd preparation system with water cooling system

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Product Overview

Description


Three Zone Quartz Tube Furnace with 3 Channel Gas Mixer, Vacuum Pump, & Anti-Corrosive Vacuum Gauge



Product Description


OTF-1200X-80-F3LV is a CE certified splitable three zones Tube furnace with mechanical vacuum pump


& digital vacuum gauge and three channels gas flowing system, which can achieve vacuum up to 10-2 torr and mix


1-3 type of gases for CVD or diffusion. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases.


 


1.Regional refinding for semiconductor of germanium and silicon


2.CVD experiment


3.Preparation of carbon nanotubes


4.Growth of graphene


5.Crystalline silicon substrate coating


6.Diffusion welding for metal materials


7.Heat treatment under the vacuum of atmosphere surroundings


 


Features of cy high efficiency furnace


1.Fast heating and cooling, maximum rate: 0-100°c/min


2.Multi-function: CVD experiment, growth of graphene, crystalline silicon substrate coating and etc


3.LED display or LCD touch screen


4.Slide type, can manual sliding or electric sliding


5.Can connect with vacuum pump and atmosphere furnace.


 


Specification  














































































Furnace Construction



Double layer steel casing with air cooling 


High purity alumina fiber insulation for max. energy saving 


Splitable cover for easy tube replacement 



Power Consumption



5 KW



Input Voltage 



AC 208-240V Single Phase, 50 or 60 Hz 



Maximum Temperature 



1200 C 



Continuous Temperature 



1100 C 



Maximum Heating Rate 



<= 20 C /min 



Heating Zone Length



Three zones: (880mm, 35" in total)


Zone 1: 220mm (8.6" )


Zone 2: 440mm (17.3")


Zone 3: 220 mm (8.6")



Constant Temperature Zone



If three zones are set at the same temperature, constant temperature zone is 25" 


(625 mm) long with a temperature discrepancy of +/- 1oC.


If using only one zone (center zone), constant temperature zone is 4.3" (110 mm) 


long with a temperature discrepancy of +/- 1oC.



Temperature Accuracy



+/- 1oC



Heating Elements



Fe-Cr-Al Alloy doped by Mo



Temperature Controller



Three precision temperature controllers to control three zones separately.


PID automatic control with 30 programmable segments for precise control 


of heating rate, cooling rate and dwell time.


Built in overheating & broken thermocouple protection.


Over temperature protection and alarm allows for operation without attendant(s).


+/- 1 C temperature accuracy.


RS485 Communications Port..



Quartz Tube& Sealing Flanges



80 mm O.D x 72 mm ID. x 1400 mm fused quartz tube included. 


Vacuum flanges with valves and pressure gauge are included. 


Thermal block must be placed inside tube as the drawing below 



Vacuum Sealing Flanges



Two stainless steel flanges with both vacuum gauge and valves included.


Min. vacuum pressure achieved by mechanical pump is 5.5 m-torr. ( 5.5x10^-3 torr). 


The pressure can reach 10^-5 torr by using mechanical + molecular pump.


Leaking rate is < 5 m-torr / min. and stable vacuum pressure after 24 hours is < 2 torr.



Oxygen Monitoring



An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems


 for preventing or reducing oxidation. Please click the picture below to learn more:



Vacuum Pump



120 L/m Rotary Vane Vacuum Pump is included with max. vacuum pressure


 of 10^-2torr. Stainless steel hose tube is included for connecting to tube furnace.



Gas Flow Meter and


 Pressure Meter


 



Three gas flow-meters (4% accuracy FS) are installed inside the mobile case to 


enable monitoring of gas flowing rates 


Compact direct read flow meter, 10-100 cc/min.


Compact direct read flow meter, 16-160 cc/min.


Compact direct read flow meter, 25-250 cc/min.



Valves



Four stainless steel valves are installed in the side panel of mobile cart to 


control mixing of three inlet gases separately



Dimensions



Furnace: 1100 X 450 x 670 mm


Bottom Mobile case: 600x600x597 mm



 


 More details products


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Packaging & Shipping


Plastic paper inside, polyfoam filled, plywood box outside


pack


Plastic paper inside, polyfoam filled, plywood box outside 


shipment


Shipping and transportation as customer request. Generally, our mode of transport are by sea, by air or rail transport





Our Services


1. Factory prices with the best quality.
2. One year free-of-charge maintenance for all the dental equipment
3. Customized service for special demand
4. Fast and flexible delivery, by sea, by air, by express
5. Quick response within 24 hours
How to order
1. If you are interested in our products, please tell us the model number and quantity.
2. We will make a proforma invoice for your order.
3. We will deliver the product ASAP on receipt of the payment
Guarantee
1. Guarantee for one year after shipment.
Payment
1. Western Union
2. PayPal
3. Secure Payment through Alibaba
4. Telegraphic transfer
5. L/C





Company Information


Zhengzhou TAINUO Film Materials Co., Ltd is mainly engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches. Independence and innovation is the company's tenet.Our main products include:?tube furnace, muffle furnace, plasma cleaner, vacuum furnace, atmosphere furnace,coting equipment,film coater,smelting furnace,vacuum pump,magnetron sputtering,plasma equipment,high voltage power supply,tablet press,ball mill grinding machine,polishing machine,cutting machine,CVD&PVD system and customized?lab equipment.Welcome you come to visit us.


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FAQ


1. Are you a manufacturer or trade company ?
Yes,you can assured that we are a professional manufacturer with full experience, and
doing business in domestic and oversea for many years.
2. We are not professional for operation and installation of your machine?
While this is not difficult to solve,our machine is easy to operate,no need to
professional training,and the instruction manual and vedio we make can teach you step by step.
What’s more,we have professional engineers , if needed we can send them to your side to solve the problem.
Also we supply online service at any time.
3. How about packaging ? if machine damaged,what should I do ?
Usually machine is packed with wooden case and standard export carton,
plywood carton or as your requirement. Before delivery we will also send you the packing photos of the goods to confirm with you. After agreed, we will deliver it.
Damage haven’t happened before, if happen,we will arrange replacement.
4. We haven’t do business before,how can I trust your company and machine ?
We have been GOLD supplier with no complaints on Alibaba.and our machine have exported to many countries all over the world.


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